Evaluation of Thermal and Radiation Induced Chemistries of Metal Oxo-Hydroxo Clusters for Next-Generation Nanoscale Inorganic Resists

Richard P. Oleksak, Rose E. Ruther, Feixiang Luo, Jennie M. Amador, Shawn R. Decker, Milton N. Jackson, Joshua R. Motley, Jason K. Stowers, Darren W. Johnson, Eric L. Garfunkel, Douglas A. Keszler, Gregory S. Herman

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6 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science