We report measurements of the surface peak intensity observed in high-energy He+ ion scattering from Si(001)-2 × 1 surfaces as a function of projectile energy (0.1 to 2.0 MeV) and substrate temperature. Comparison of these results with measurements for the hydrogen adsorbed (1×1) surface and with calculation yield direct evidence of extensive sub-surface strain and give an indication of the magnitude of the atomic displacements.
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Condensed Matter Physics
- Surfaces and Interfaces