Evidence of multilayer distortions in the reconstructed Si(001) surface

I. Stensgaard, Leonard C Feldman, P. J. Silverman

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

We report measurements of the surface peak intensity observed in high-energy He+ ion scattering from Si(001)-2 × 1 surfaces as a function of projectile energy (0.1 to 2.0 MeV) and substrate temperature. Comparison of these results with measurements for the hydrogen adsorbed (1×1) surface and with calculation yield direct evidence of extensive sub-surface strain and give an indication of the magnitude of the atomic displacements.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalSurface Science
Volume102
Issue number1
DOIs
Publication statusPublished - Jan 1 1981

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

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