Evidence of multilayer distortions in the reconstructed Si(001) surface

I. Stensgaard, Leonard C Feldman, P. J. Silverman

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

We report measurements of the surface peak intensity observed in high-energy He+ ion scattering from Si(001)-2 × 1 surfaces as a function of projectile energy (0.1 to 2.0 MeV) and substrate temperature. Comparison of these results with measurements for the hydrogen adsorbed (1×1) surface and with calculation yield direct evidence of extensive sub-surface strain and give an indication of the magnitude of the atomic displacements.

Original languageEnglish
Pages (from-to)1-6
Number of pages6
JournalSurface Science
Volume102
Issue number1
DOIs
Publication statusPublished - Jan 1 1981

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Multilayers
ion scattering
Projectiles
projectiles
Hydrogen
indication
Scattering
Ions
energy
Substrates
hydrogen
Temperature
temperature

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Evidence of multilayer distortions in the reconstructed Si(001) surface. / Stensgaard, I.; Feldman, Leonard C; Silverman, P. J.

In: Surface Science, Vol. 102, No. 1, 01.01.1981, p. 1-6.

Research output: Contribution to journalArticle

Stensgaard, I. ; Feldman, Leonard C ; Silverman, P. J. / Evidence of multilayer distortions in the reconstructed Si(001) surface. In: Surface Science. 1981 ; Vol. 102, No. 1. pp. 1-6.
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