Evolution of surface relief during firing of PZT thin films

Emil A. Kneer, Dunbar P Birnie, G. Teowee, J. C. Podlesny

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

Original languageEnglish
Pages (from-to)67-72
Number of pages6
JournalFerroelectrics
Volume152
Issue number1 -4 pt 2
Publication statusPublished - 1994

Fingerprint

Platinum
Thin films
Electrodes
electrodes
platinum
thin films
surface roughness
Electric properties
adhesion
Adhesion
Surface roughness
electrical properties
preparation

ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Engineering(all)

Cite this

Kneer, E. A., Birnie, D. P., Teowee, G., & Podlesny, J. C. (1994). Evolution of surface relief during firing of PZT thin films. Ferroelectrics, 152(1 -4 pt 2), 67-72.

Evolution of surface relief during firing of PZT thin films. / Kneer, Emil A.; Birnie, Dunbar P; Teowee, G.; Podlesny, J. C.

In: Ferroelectrics, Vol. 152, No. 1 -4 pt 2, 1994, p. 67-72.

Research output: Contribution to journalArticle

Kneer, EA, Birnie, DP, Teowee, G & Podlesny, JC 1994, 'Evolution of surface relief during firing of PZT thin films', Ferroelectrics, vol. 152, no. 1 -4 pt 2, pp. 67-72.
Kneer EA, Birnie DP, Teowee G, Podlesny JC. Evolution of surface relief during firing of PZT thin films. Ferroelectrics. 1994;152(1 -4 pt 2):67-72.
Kneer, Emil A. ; Birnie, Dunbar P ; Teowee, G. ; Podlesny, J. C. / Evolution of surface relief during firing of PZT thin films. In: Ferroelectrics. 1994 ; Vol. 152, No. 1 -4 pt 2. pp. 67-72.
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