Evolution of surface relief during firing of pzt thin films

Emil A. Kneer, Dunbar P. Birnie, G. Teowee, J. C. Podlesny

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

Original languageEnglish
Pages (from-to)67-72
Number of pages6
Issue number1
Publication statusPublished - Feb 1994

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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