Evolution of surface relief during firing of PZT thin films

Emil A. Kneer, Dunbar P Birnie, G. Teowee, J. C. Podlesny

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8 Citations (Scopus)

Abstract

A controlled test of platinum bottom electrode preparation has been performed. Different types of Ti or TiOx layers have been used to promote adhesion of the platinum electrode. This paper correlates the surface roughness of these electrodes with electrical properties that result.

Original languageEnglish
Pages (from-to)67-72
Number of pages6
JournalFerroelectrics
Volume152
Issue number1 -4 pt 2
Publication statusPublished - 1994

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ASJC Scopus subject areas

  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Engineering(all)

Cite this

Kneer, E. A., Birnie, D. P., Teowee, G., & Podlesny, J. C. (1994). Evolution of surface relief during firing of PZT thin films. Ferroelectrics, 152(1 -4 pt 2), 67-72.