Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics

Jingtian Hu, Xiaochen Ren, Amber N. Reed, Thaddeus Reese, Dongjoon Rhee, Brandon Howe, Lincoln J. Lauhon, Augustine M. Urbas, Teri W Odom

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

This paper describes the design and prototyping of single-crystalline TiN plasmonic metasurfaces based on subwavelength hole arrays. An evolutionary algorithm with a multiobjective fitness function was developed to produce a variety of three-dimensional (3D) light profiles with balanced intensities at the light spots. We also demonstrated a simple, efficient technique to prototype these lattice designs in large-area TiN films by combining focused ion beam milling and wet chemical etching. Multilevel phase control was achieved by tuning nanohole size, and multipoint focusing with arbitrary light spot patterns was realized. Using anisotropic nanohole shapes, the TiN lattice lenses could exhibit dynamic tuning of the focal profiles by changing the polarization of incident light.

Original languageEnglish
Pages (from-to)606-612
Number of pages7
JournalACS Photonics
Volume4
Issue number3
DOIs
Publication statusPublished - Mar 15 2017

Fingerprint

Titanium nitride
titanium nitrides
Crystal lattices
Optics
optics
Crystalline materials
Light
Tuning
tuning
Phase control
phase control
fitness
Wet etching
Focused ion beams
profiles
Evolutionary algorithms
Lenses
ion beams
lenses
prototypes

Keywords

  • evolutionary algorithm
  • flat optics
  • metasurface
  • surface plasmon
  • titanium nitride

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biotechnology
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics. / Hu, Jingtian; Ren, Xiaochen; Reed, Amber N.; Reese, Thaddeus; Rhee, Dongjoon; Howe, Brandon; Lauhon, Lincoln J.; Urbas, Augustine M.; Odom, Teri W.

In: ACS Photonics, Vol. 4, No. 3, 15.03.2017, p. 606-612.

Research output: Contribution to journalArticle

Hu, J, Ren, X, Reed, AN, Reese, T, Rhee, D, Howe, B, Lauhon, LJ, Urbas, AM & Odom, TW 2017, 'Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics', ACS Photonics, vol. 4, no. 3, pp. 606-612. https://doi.org/10.1021/acsphotonics.6b00955
Hu, Jingtian ; Ren, Xiaochen ; Reed, Amber N. ; Reese, Thaddeus ; Rhee, Dongjoon ; Howe, Brandon ; Lauhon, Lincoln J. ; Urbas, Augustine M. ; Odom, Teri W. / Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics. In: ACS Photonics. 2017 ; Vol. 4, No. 3. pp. 606-612.
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