Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics

Jingtian Hu; Xiaochen Ren; Amber N. Reed; Thaddeus Reese; Dongjoon Rhee; Brandon Howe; Lincoln J. Lauhon; Augustine M. Urbas; Teri W Odom

doi:10.1021/acsphotonics.6b00955

Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics

Jingtian Hu, Xiaochen Ren, Amber N. Reed, Thaddeus Reese, Dongjoon Rhee, Brandon Howe, Lincoln J. Lauhon, Augustine M. Urbas, Teri W Odom

Northwestern University

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

This paper describes the design and prototyping of single-crystalline TiN plasmonic metasurfaces based on subwavelength hole arrays. An evolutionary algorithm with a multiobjective fitness function was developed to produce a variety of three-dimensional (3D) light profiles with balanced intensities at the light spots. We also demonstrated a simple, efficient technique to prototype these lattice designs in large-area TiN films by combining focused ion beam milling and wet chemical etching. Multilevel phase control was achieved by tuning nanohole size, and multipoint focusing with arbitrary light spot patterns was realized. Using anisotropic nanohole shapes, the TiN lattice lenses could exhibit dynamic tuning of the focal profiles by changing the polarization of incident light.

Original language	English
Pages (from-to)	606-612
Number of pages	7
Journal	ACS Photonics
Volume	4
Issue number	3
DOIs	https://doi.org/10.1021/acsphotonics.6b00955
Publication status	Published - Mar 15 2017

Keywords

evolutionary algorithm
flat optics
metasurface
surface plasmon
titanium nitride

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biotechnology
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1021/acsphotonics.6b00955

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title = "Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics",

abstract = "This paper describes the design and prototyping of single-crystalline TiN plasmonic metasurfaces based on subwavelength hole arrays. An evolutionary algorithm with a multiobjective fitness function was developed to produce a variety of three-dimensional (3D) light profiles with balanced intensities at the light spots. We also demonstrated a simple, efficient technique to prototype these lattice designs in large-area TiN films by combining focused ion beam milling and wet chemical etching. Multilevel phase control was achieved by tuning nanohole size, and multipoint focusing with arbitrary light spot patterns was realized. Using anisotropic nanohole shapes, the TiN lattice lenses could exhibit dynamic tuning of the focal profiles by changing the polarization of incident light.",

keywords = "evolutionary algorithm, flat optics, metasurface, surface plasmon, titanium nitride",

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AU - Reed, Amber N.

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AU - Rhee, Dongjoon

AU - Howe, Brandon

AU - Lauhon, Lincoln J.

AU - Urbas, Augustine M.

AU - Odom, Teri W

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