Abstract
This paper describes the design and prototyping of single-crystalline TiN plasmonic metasurfaces based on subwavelength hole arrays. An evolutionary algorithm with a multiobjective fitness function was developed to produce a variety of three-dimensional (3D) light profiles with balanced intensities at the light spots. We also demonstrated a simple, efficient technique to prototype these lattice designs in large-area TiN films by combining focused ion beam milling and wet chemical etching. Multilevel phase control was achieved by tuning nanohole size, and multipoint focusing with arbitrary light spot patterns was realized. Using anisotropic nanohole shapes, the TiN lattice lenses could exhibit dynamic tuning of the focal profiles by changing the polarization of incident light.
| Original language | English |
|---|---|
| Pages (from-to) | 606-612 |
| Number of pages | 7 |
| Journal | ACS Photonics |
| Volume | 4 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Mar 15 2017 |
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Keywords
- evolutionary algorithm
- flat optics
- metasurface
- surface plasmon
- titanium nitride
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Biotechnology
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering
Cite this
Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics. / Hu, Jingtian; Ren, Xiaochen; Reed, Amber N.; Reese, Thaddeus; Rhee, Dongjoon; Howe, Brandon; Lauhon, Lincoln J.; Urbas, Augustine M.; Odom, Teri W.
In: ACS Photonics, Vol. 4, No. 3, 15.03.2017, p. 606-612.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Evolutionary Design and Prototyping of Single Crystalline Titanium Nitride Lattice Optics
AU - Hu, Jingtian
AU - Ren, Xiaochen
AU - Reed, Amber N.
AU - Reese, Thaddeus
AU - Rhee, Dongjoon
AU - Howe, Brandon
AU - Lauhon, Lincoln J.
AU - Urbas, Augustine M.
AU - Odom, Teri W
PY - 2017/3/15
Y1 - 2017/3/15
N2 - This paper describes the design and prototyping of single-crystalline TiN plasmonic metasurfaces based on subwavelength hole arrays. An evolutionary algorithm with a multiobjective fitness function was developed to produce a variety of three-dimensional (3D) light profiles with balanced intensities at the light spots. We also demonstrated a simple, efficient technique to prototype these lattice designs in large-area TiN films by combining focused ion beam milling and wet chemical etching. Multilevel phase control was achieved by tuning nanohole size, and multipoint focusing with arbitrary light spot patterns was realized. Using anisotropic nanohole shapes, the TiN lattice lenses could exhibit dynamic tuning of the focal profiles by changing the polarization of incident light.
AB - This paper describes the design and prototyping of single-crystalline TiN plasmonic metasurfaces based on subwavelength hole arrays. An evolutionary algorithm with a multiobjective fitness function was developed to produce a variety of three-dimensional (3D) light profiles with balanced intensities at the light spots. We also demonstrated a simple, efficient technique to prototype these lattice designs in large-area TiN films by combining focused ion beam milling and wet chemical etching. Multilevel phase control was achieved by tuning nanohole size, and multipoint focusing with arbitrary light spot patterns was realized. Using anisotropic nanohole shapes, the TiN lattice lenses could exhibit dynamic tuning of the focal profiles by changing the polarization of incident light.
KW - evolutionary algorithm
KW - flat optics
KW - metasurface
KW - surface plasmon
KW - titanium nitride
UR - http://www.scopus.com/inward/record.url?scp=85015396237&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85015396237&partnerID=8YFLogxK
U2 - 10.1021/acsphotonics.6b00955
DO - 10.1021/acsphotonics.6b00955
M3 - Article
AN - SCOPUS:85015396237
VL - 4
SP - 606
EP - 612
JO - ACS Photonics
JF - ACS Photonics
SN - 2330-4022
IS - 3
ER -