Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition

R. F. Haglund, R. Lopez, J. Y. Suh, L. C. Feldman, T. E. Haynes, L. A. Boatner

Research output: Contribution to journalConference article


Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.

Original languageEnglish
Pages (from-to)601-610
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Oct 25 2004
EventPhoton Processing in Microelectronics and Photonics III - San Jose, CA, United States
Duration: Jan 26 2004Jan 29 2004


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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