Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition

R. F. Haglund; R. Lopez; J. Y. Suh; L. C. Feldman; T. E. Haynes; L. A. Boatner

doi:10.1117/12.532331

Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition

R. F. Haglund, R. Lopez, J. Y. Suh, L. C. Feldman, T. E. Haynes, L. A. Boatner

Rutgers University

Research output: Contribution to journal › Conference article

Abstract

Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.

Original language	English
Pages (from-to)	601-610
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5339
DOIs	https://doi.org/10.1117/12.532331
Publication status	Published - Oct 25 2004
Event	Photon Processing in Microelectronics and Photonics III - San Jose, CA, United States Duration: Jan 26 2004 → Jan 29 2004

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ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

Haglund, R. F., Lopez, R., Suh, J. Y., Feldman, L. C., Haynes, T. E., & Boatner, L. A. (2004). Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. Proceedings of SPIE - The International Society for Optical Engineering, 5339, 601-610. https://doi.org/10.1117/12.532331

Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. / Haglund, R. F.; Lopez, R.; Suh, J. Y.; Feldman, L. C.; Haynes, T. E.; Boatner, L. A.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5339, 25.10.2004, p. 601-610.

Research output: Contribution to journal › Conference article

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10.1117/12.532331