Abstract
Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.
| Original language | English |
|---|---|
| Pages (from-to) | 601-610 |
| Number of pages | 10 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5339 |
| DOIs | |
| Publication status | Published - Oct 25 2004 |
| Event | Photon Processing in Microelectronics and Photonics III - San Jose, CA, United States Duration: Jan 26 2004 → Jan 29 2004 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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Cite this
Haglund, R. F., Lopez, R., Suh, J. Y., Feldman, L. C., Haynes, T. E., & Boatner, L. A. (2004). Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. Proceedings of SPIE - The International Society for Optical Engineering, 5339, 601-610. https://doi.org/10.1117/12.532331