Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition

R. F. Haglund, R. Lopez, J. Y. Suh, Leonard C Feldman, T. E. Haynes, L. A. Boatner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsP.R. Herman, J. Fieret, A. Pique, T. Okada, F.G. Bachmann, W. Hoving, K. Washio, X. Xu, J.J. Dubowski
Pages601-610
Number of pages10
Volume5339
DOIs
Publication statusPublished - 2004
EventPhoton Processing in Microelectronics and Photonics III - San Jose, CA, United States
Duration: Jan 26 2004Jan 29 2004

Other

OtherPhoton Processing in Microelectronics and Photonics III
CountryUnited States
CitySan Jose, CA
Period1/26/041/29/04

Fingerprint

Ion beam lithography
Focused ion beams
Pulsed laser deposition
dioxides
Vanadium
vanadium
pulsed laser deposition
lithography
ion beams
lasers
Transition metals
Electric properties
Physics
Optical properties
transition metals
electrical properties
insulators
Nanoparticles
optical properties
nanoparticles

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Haglund, R. F., Lopez, R., Suh, J. Y., Feldman, L. C., Haynes, T. E., & Boatner, L. A. (2004). Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. In P. R. Herman, J. Fieret, A. Pique, T. Okada, F. G. Bachmann, W. Hoving, K. Washio, X. Xu, ... J. J. Dubowski (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5339, pp. 601-610) https://doi.org/10.1117/12.532331

Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. / Haglund, R. F.; Lopez, R.; Suh, J. Y.; Feldman, Leonard C; Haynes, T. E.; Boatner, L. A.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / P.R. Herman; J. Fieret; A. Pique; T. Okada; F.G. Bachmann; W. Hoving; K. Washio; X. Xu; J.J. Dubowski. Vol. 5339 2004. p. 601-610.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haglund, RF, Lopez, R, Suh, JY, Feldman, LC, Haynes, TE & Boatner, LA 2004, Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. in PR Herman, J Fieret, A Pique, T Okada, FG Bachmann, W Hoving, K Washio, X Xu & JJ Dubowski (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5339, pp. 601-610, Photon Processing in Microelectronics and Photonics III, San Jose, CA, United States, 1/26/04. https://doi.org/10.1117/12.532331
Haglund RF, Lopez R, Suh JY, Feldman LC, Haynes TE, Boatner LA. Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. In Herman PR, Fieret J, Pique A, Okada T, Bachmann FG, Hoving W, Washio K, Xu X, Dubowski JJ, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5339. 2004. p. 601-610 https://doi.org/10.1117/12.532331
Haglund, R. F. ; Lopez, R. ; Suh, J. Y. ; Feldman, Leonard C ; Haynes, T. E. ; Boatner, L. A. / Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. Proceedings of SPIE - The International Society for Optical Engineering. editor / P.R. Herman ; J. Fieret ; A. Pique ; T. Okada ; F.G. Bachmann ; W. Hoving ; K. Washio ; X. Xu ; J.J. Dubowski. Vol. 5339 2004. pp. 601-610
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