Abstract
Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | P.R. Herman, J. Fieret, A. Pique, T. Okada, F.G. Bachmann, W. Hoving, K. Washio, X. Xu, J.J. Dubowski |
| Pages | 601-610 |
| Number of pages | 10 |
| Volume | 5339 |
| DOIs | |
| Publication status | Published - 2004 |
| Event | Photon Processing in Microelectronics and Photonics III - San Jose, CA, United States Duration: Jan 26 2004 → Jan 29 2004 |
Other
| Other | Photon Processing in Microelectronics and Photonics III |
|---|---|
| Country | United States |
| City | San Jose, CA |
| Period | 1/26/04 → 1/29/04 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition. / Haglund, R. F.; Lopez, R.; Suh, J. Y.; Feldman, Leonard C; Haynes, T. E.; Boatner, L. A.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / P.R. Herman; J. Fieret; A. Pique; T. Okada; F.G. Bachmann; W. Hoving; K. Washio; X. Xu; J.J. Dubowski. Vol. 5339 2004. p. 601-610.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fabricating arrays of vanadium dioxide nanodisks by focused ion-beam lithography and pulsed laser deposition
AU - Haglund, R. F.
AU - Lopez, R.
AU - Suh, J. Y.
AU - Feldman, Leonard C
AU - Haynes, T. E.
AU - Boatner, L. A.
PY - 2004
Y1 - 2004
N2 - Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.
AB - Vanadium dioxide undergoes a structural (monoclinic to tetragonal) insulator-to-metal transition at 70°C, accompanied by large changes in electrical and optical properties. By combining focused ion-beam lithography and pulsed laser deposition, patterned nanoscale arrays of vanadium dioxide nanoparticles are created that can be used for studies of linear and nonlinear optical physics, as well as demonstrating the potential for a variety of applications.
UR - http://www.scopus.com/inward/record.url?scp=5444274503&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=5444274503&partnerID=8YFLogxK
U2 - 10.1117/12.532331
DO - 10.1117/12.532331
M3 - Conference contribution
VL - 5339
SP - 601
EP - 610
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Herman, P.R.
A2 - Fieret, J.
A2 - Pique, A.
A2 - Okada, T.
A2 - Bachmann, F.G.
A2 - Hoving, W.
A2 - Washio, K.
A2 - Xu, X.
A2 - Dubowski, J.J.
ER -