Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies

Jr Haglund R.F., R. A. Weller, C. E. Heiner, M. D. McMahon, R. H. Magruder, A. T. Newton, L. Shen, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe recent experiments in which we attempted the initial steps for fabricating two-dimensional arrays of metal nanocrystals. We use a commercial pulsed-laser deposition system in concert with a focused ion beam to attempt control over both lateral and vertical dimensions at the nanometer length scale. In our experiments, regular arrays of holes typically 80 nm in diameter were drilled in Si substrates using the focused ion beam. Silver atoms were then deposited onto these substrates by pulsed laser evaporation from a metallic target in high vacuum. Under certain conditions of substrate temperature, laser pulse repetition rate, and fluence, small silver nanoclusters form preferentially around the structures previously etched in the silicon surfaces by the focused ion beam.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsL. Merhari, J.A. Rogers, A. Karim, D.J. Norris
Volume636
Publication statusPublished - 2001
EventNonlithigraphic and Lithographic Methods of Nanofabrication -From Ultralarge-Scale Integration to Photonics to Molecular Electronics - Boston, MA, United States
Duration: Nov 26 2000Dec 1 2000

Other

OtherNonlithigraphic and Lithographic Methods of Nanofabrication -From Ultralarge-Scale Integration to Photonics to Molecular Electronics
CountryUnited States
CityBoston, MA
Period11/26/0012/1/00

Fingerprint

Focused ion beams
Pulsed laser deposition
Nanocrystals
Metals
Silver
Substrates
Pulse repetition rate
Nanoclusters
Silicon
Pulsed lasers
Laser pulses
Evaporation
Experiments
Vacuum
Atoms
Temperature

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Haglund R.F., J., Weller, R. A., Heiner, C. E., McMahon, M. D., Magruder, R. H., Newton, A. T., ... Feldman, L. C. (2001). Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies. In L. Merhari, J. A. Rogers, A. Karim, & D. J. Norris (Eds.), Materials Research Society Symposium - Proceedings (Vol. 636)

Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies. / Haglund R.F., Jr; Weller, R. A.; Heiner, C. E.; McMahon, M. D.; Magruder, R. H.; Newton, A. T.; Shen, L.; Feldman, Leonard C.

Materials Research Society Symposium - Proceedings. ed. / L. Merhari; J.A. Rogers; A. Karim; D.J. Norris. Vol. 636 2001.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haglund R.F., J, Weller, RA, Heiner, CE, McMahon, MD, Magruder, RH, Newton, AT, Shen, L & Feldman, LC 2001, Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies. in L Merhari, JA Rogers, A Karim & DJ Norris (eds), Materials Research Society Symposium - Proceedings. vol. 636, Nonlithigraphic and Lithographic Methods of Nanofabrication -From Ultralarge-Scale Integration to Photonics to Molecular Electronics, Boston, MA, United States, 11/26/00.
Haglund R.F. J, Weller RA, Heiner CE, McMahon MD, Magruder RH, Newton AT et al. Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies. In Merhari L, Rogers JA, Karim A, Norris DJ, editors, Materials Research Society Symposium - Proceedings. Vol. 636. 2001
Haglund R.F., Jr ; Weller, R. A. ; Heiner, C. E. ; McMahon, M. D. ; Magruder, R. H. ; Newton, A. T. ; Shen, L. ; Feldman, Leonard C. / Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies. Materials Research Society Symposium - Proceedings. editor / L. Merhari ; J.A. Rogers ; A. Karim ; D.J. Norris. Vol. 636 2001.
@inproceedings{92a840a0fc434b0087df4764cf2c4ed0,
title = "Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies",
abstract = "We describe recent experiments in which we attempted the initial steps for fabricating two-dimensional arrays of metal nanocrystals. We use a commercial pulsed-laser deposition system in concert with a focused ion beam to attempt control over both lateral and vertical dimensions at the nanometer length scale. In our experiments, regular arrays of holes typically 80 nm in diameter were drilled in Si substrates using the focused ion beam. Silver atoms were then deposited onto these substrates by pulsed laser evaporation from a metallic target in high vacuum. Under certain conditions of substrate temperature, laser pulse repetition rate, and fluence, small silver nanoclusters form preferentially around the structures previously etched in the silicon surfaces by the focused ion beam.",
author = "{Haglund R.F.}, Jr and Weller, {R. A.} and Heiner, {C. E.} and McMahon, {M. D.} and Magruder, {R. H.} and Newton, {A. T.} and L. Shen and Feldman, {Leonard C}",
year = "2001",
language = "English",
volume = "636",
editor = "L. Merhari and J.A. Rogers and A. Karim and D.J. Norris",
booktitle = "Materials Research Society Symposium - Proceedings",

}

TY - GEN

T1 - Fabricating two-dimensional metal nanocrystal arrays using pulsed-laser deposition and focused ion-beam technologies

AU - Haglund R.F., Jr

AU - Weller, R. A.

AU - Heiner, C. E.

AU - McMahon, M. D.

AU - Magruder, R. H.

AU - Newton, A. T.

AU - Shen, L.

AU - Feldman, Leonard C

PY - 2001

Y1 - 2001

N2 - We describe recent experiments in which we attempted the initial steps for fabricating two-dimensional arrays of metal nanocrystals. We use a commercial pulsed-laser deposition system in concert with a focused ion beam to attempt control over both lateral and vertical dimensions at the nanometer length scale. In our experiments, regular arrays of holes typically 80 nm in diameter were drilled in Si substrates using the focused ion beam. Silver atoms were then deposited onto these substrates by pulsed laser evaporation from a metallic target in high vacuum. Under certain conditions of substrate temperature, laser pulse repetition rate, and fluence, small silver nanoclusters form preferentially around the structures previously etched in the silicon surfaces by the focused ion beam.

AB - We describe recent experiments in which we attempted the initial steps for fabricating two-dimensional arrays of metal nanocrystals. We use a commercial pulsed-laser deposition system in concert with a focused ion beam to attempt control over both lateral and vertical dimensions at the nanometer length scale. In our experiments, regular arrays of holes typically 80 nm in diameter were drilled in Si substrates using the focused ion beam. Silver atoms were then deposited onto these substrates by pulsed laser evaporation from a metallic target in high vacuum. Under certain conditions of substrate temperature, laser pulse repetition rate, and fluence, small silver nanoclusters form preferentially around the structures previously etched in the silicon surfaces by the focused ion beam.

UR - http://www.scopus.com/inward/record.url?scp=0034831214&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034831214&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0034831214

VL - 636

BT - Materials Research Society Symposium - Proceedings

A2 - Merhari, L.

A2 - Rogers, J.A.

A2 - Karim, A.

A2 - Norris, D.J.

ER -