Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B.K. Teo; M. Chhowalla; G. A.J. Amaratunga; W. I. Milne; P. Legagneux; G. Pirio; L. Gangloff; D. Pribat; V. Semet; Vu Thien Binh; W. H. Bruenger; J. Eichholz; H. Hanssen; D. Friedrich; S. B. Lee; D. G. Hasko; H. Ahmed

doi:10.1116/1.1545755

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, P. Legagneux, G. Pirio, L. Gangloff, D. Pribat, V. Semet, Vu Thien Binh, W. H. Bruenger, J. Eichholz, H. Hanssen, D. Friedrich, S. B. Lee, D. G. Hasko, H. Ahmed

Rutgers University

Research output: Contribution to journal › Review article

87 Citations (Scopus)

Original language	English
Pages (from-to)	693-697
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1545755
Publication status	Published - Jan 1 2003

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1116/1.1545755

Fingerprint Dive into the research topics of 'Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system'. Together they form a unique fingerprint.

Cite this

Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Legagneux, P., Pirio, G., Gangloff, L., Pribat, D., Semet, V., Binh, V. T., Bruenger, W. H., Eichholz, J., Hanssen, H., Friedrich, D., Lee, S. B., Hasko, D. G., & Ahmed, H. (2003). Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(2), 693-697. https://doi.org/10.1116/1.1545755

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. / Teo, K. B.K.; Chhowalla, M.; Amaratunga, G. A.J.; Milne, W. I.; Legagneux, P.; Pirio, G.; Gangloff, L.; Pribat, D.; Semet, V.; Binh, Vu Thien; Bruenger, W. H.; Eichholz, J.; Hanssen, H.; Friedrich, D.; Lee, S. B.; Hasko, D. G.; Ahmed, H.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 2, 01.01.2003, p. 693-697.

Research output: Contribution to journal › Review article

Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Legagneux, P, Pirio, G, Gangloff, L, Pribat, D, Semet, V, Binh, VT, Bruenger, WH, Eichholz, J, Hanssen, H, Friedrich, D, Lee, SB, Hasko, DG & Ahmed, H 2003, 'Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 21, no. 2, pp. 693-697. https://doi.org/10.1116/1.1545755

Teo, K. B.K. ; Chhowalla, M. ; Amaratunga, G. A.J. ; Milne, W. I. ; Legagneux, P. ; Pirio, G. ; Gangloff, L. ; Pribat, D. ; Semet, V. ; Binh, Vu Thien ; Bruenger, W. H. ; Eichholz, J. ; Hanssen, H. ; Friedrich, D. ; Lee, S. B. ; Hasko, D. G. ; Ahmed, H. / Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2003 ; Vol. 21, No. 2. pp. 693-697.

@article{1b0aeaaccf134256819f4a9ccc585317,

title = "Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system",

author = "Teo, {K. B.K.} and M. Chhowalla and Amaratunga, {G. A.J.} and Milne, {W. I.} and P. Legagneux and G. Pirio and L. Gangloff and D. Pribat and V. Semet and Binh, {Vu Thien} and Bruenger, {W. H.} and J. Eichholz and H. Hanssen and D. Friedrich and Lee, {S. B.} and Hasko, {D. G.} and H. Ahmed",

year = "2003",

month = jan,

day = "1",

doi = "10.1116/1.1545755",

language = "English",

volume = "21",

pages = "693--697",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

number = "2",

}

TY - JOUR

T1 - Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

AU - Teo, K. B.K.

AU - Chhowalla, M.

AU - Amaratunga, G. A.J.

AU - Milne, W. I.

AU - Legagneux, P.

AU - Pirio, G.

AU - Gangloff, L.

AU - Pribat, D.

AU - Semet, V.

AU - Binh, Vu Thien

AU - Bruenger, W. H.

AU - Eichholz, J.

AU - Hanssen, H.

AU - Friedrich, D.

AU - Lee, S. B.

AU - Hasko, D. G.

AU - Ahmed, H.

PY - 2003/1/1

Y1 - 2003/1/1

UR - http://www.scopus.com/inward/record.url?scp=0037274160&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037274160&partnerID=8YFLogxK

U2 - 10.1116/1.1545755

DO - 10.1116/1.1545755

M3 - Review article

AN - SCOPUS:0037274160

VL - 21

SP - 693

EP - 697

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

SN - 1071-1023

IS - 2

ER -