Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, P. Legagneux, G. Pirio, L. Gangloff, D. Pribat, V. Semet, Vu Thien Binh, W. H. Bruenger, J. Eichholz, H. Hanssen, D. Friedrich, S. B. Lee, D. G. Hasko, H. Ahmed

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Abstract

The development of the Nanolith parallel electron-beam writing head was discussed. The fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in the lithographic system were described. The microcathode exhibited a peak current of 10.5 μA at 48 V when operated with a duty cycle of 0.5 percent.

Original languageEnglish
Pages (from-to)693-697
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number2
Publication statusPublished - Mar 1 2003

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Legagneux, P., Pirio, G., Gangloff, L., Pribat, D., Semet, V., Binh, V. T., Bruenger, W. H., Eichholz, J., Hanssen, H., Friedrich, D., Lee, S. B., Hasko, D. G., & Ahmed, H. (2003). Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(2), 693-697.