Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B.K. Teo; M. Chhowalla; G. A.J. Amaratunga; W. I. Milne; P. Legagneux; G. Pirio; L. Gangloff; D. Pribat; V. Semet; Vu Thien Binh; W. H. Bruenger; J. Eichholz; H. Hanssen; D. Friedrich; S. B. Lee; D. G. Hasko; H. Ahmed

doi:10.1116/1.1545755

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, P. Legagneux, G. Pirio, L. Gangloff, D. Pribat, V. Semet, Vu Thien Binh, W. H. Bruenger, J. Eichholz, H. Hanssen, D. Friedrich, S. B. Lee, D. G. Hasko, H. Ahmed

Rutgers University

Research output: Contribution to journal › Review article › peer-review

90 Citations (Scopus)

Original language	English
Pages (from-to)	693-697
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1545755
Publication status	Published - 2003

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Legagneux, P., Pirio, G., Gangloff, L., Pribat, D., Semet, V., Binh, V. T., Bruenger, W. H., Eichholz, J., Hanssen, H., Friedrich, D., Lee, S. B., Hasko, D. G., & Ahmed, H. (2003). Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(2), 693-697. https://doi.org/10.1116/1.1545755

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. / Teo, K. B.K.; Chhowalla, M.; Amaratunga, G. A.J.; Milne, W. I.; Legagneux, P.; Pirio, G.; Gangloff, L.; Pribat, D.; Semet, V.; Binh, Vu Thien; Bruenger, W. H.; Eichholz, J.; Hanssen, H.; Friedrich, D.; Lee, S. B.; Hasko, D. G.; Ahmed, H.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 2, 2003, p. 693-697.

Research output: Contribution to journal › Review article › peer-review

Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Legagneux, P, Pirio, G, Gangloff, L, Pribat, D, Semet, V, Binh, VT, Bruenger, WH, Eichholz, J, Hanssen, H, Friedrich, D, Lee, SB, Hasko, DG & Ahmed, H 2003, 'Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 21, no. 2, pp. 693-697. https://doi.org/10.1116/1.1545755

Teo, K. B.K. ; Chhowalla, M. ; Amaratunga, G. A.J. ; Milne, W. I. ; Legagneux, P. ; Pirio, G. ; Gangloff, L. ; Pribat, D. ; Semet, V. ; Binh, Vu Thien ; Bruenger, W. H. ; Eichholz, J. ; Hanssen, H. ; Friedrich, D. ; Lee, S. B. ; Hasko, D. G. ; Ahmed, H. / Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2003 ; Vol. 21, No. 2. pp. 693-697.

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AU - Legagneux, P.

AU - Pirio, G.

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AU - Binh, Vu Thien

AU - Bruenger, W. H.

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AU - Friedrich, D.

AU - Lee, S. B.

AU - Hasko, D. G.

AU - Ahmed, H.

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