@article{1b0aeaaccf134256819f4a9ccc585317,
title = "Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system",
author = "Teo, {K. B.K.} and M. Chhowalla and Amaratunga, {G. A.J.} and Milne, {W. I.} and P. Legagneux and G. Pirio and L. Gangloff and D. Pribat and V. Semet and Binh, {Vu Thien} and Bruenger, {W. H.} and J. Eichholz and H. Hanssen and D. Friedrich and Lee, {S. B.} and Hasko, {D. G.} and H. Ahmed",
year = "2003",
doi = "10.1116/1.1545755",
language = "English",
volume = "21",
pages = "693--697",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
number = "2",
}