Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, P. Legagneux, G. Pirio, L. Gangloff, D. Pribat, V. Semet, Vu Thien Binh, W. H. Bruenger, J. Eichholz, H. Hanssen, D. Friedrich, S. B. Lee, D. G. Hasko, H. Ahmed

Research output: Contribution to journalReview article

87 Citations (Scopus)
Original languageEnglish
Pages (from-to)693-697
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number2
DOIs
Publication statusPublished - Jan 1 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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    Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Legagneux, P., Pirio, G., Gangloff, L., Pribat, D., Semet, V., Binh, V. T., Bruenger, W. H., Eichholz, J., Hanssen, H., Friedrich, D., Lee, S. B., Hasko, D. G., & Ahmed, H. (2003). Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(2), 693-697. https://doi.org/10.1116/1.1545755