Abstract
The development of the Nanolith parallel electron-beam writing head was discussed. The fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in the lithographic system were described. The microcathode exhibited a peak current of 10.5 μA at 48 V when operated with a duty cycle of 0.5 percent.
| Original language | English |
|---|---|
| Pages (from-to) | 693-697 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 21 |
| Issue number | 2 |
| Publication status | Published - Mar 1 2003 |
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ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Cite this
Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Legagneux, P., Pirio, G., Gangloff, L., Pribat, D., Semet, V., Binh, V. T., Bruenger, W. H., Eichholz, J., Hanssen, H., Friedrich, D., Lee, S. B., Hasko, D. G., & Ahmed, H. (2003). Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(2), 693-697.