Fabrication of copper-indium-disulfide films onto Mo/glass substrates using pulsed laser deposition

R. Mu, M. H. Wu, Y. C. Liu, A. Ueda, D. O. Henderson, A. B. Hmelo, L. C. Feldman, A. Hepp

Research output: Contribution to journalConference article


Pico-second pulsed laser deposition (PLD) was employed to fabricate copper indium disulfide (CIS) thin films onto pure silica and Mo coated glass substrates. By properly preparing the target materials and controlling the elemental ratio of the Cu, In and S in the deposited film followed by post-thermal annealing, good quality copper-indium-disulfide(CIS) films can be obtained. A series of characterizations were conducted including XRD, RBS, IR, UV-Vis, AFM and STM analyses.

Original languageEnglish
Pages (from-to)55-60
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - Dec 1 2002
EventMaterials for Energy Storage, Generation and Transport - San Francisco, CA, United States
Duration: Apr 2 2002Apr 4 2002


ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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