Fabrication of free-standing nanoscale alumina membranes with controllable pore aspect ratios

Chee Seng Toh, Brendan M. Kayes, E. Joseph Nemanick, Nathan S. Lewis

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Porous alumina films with controllable pore sizes and having submicrometer film thicknesses were fabricated by the anodization of Al overlayers. The Al was deposited by sputtering onto either glass or onto silicon that had been coated with a layer of silicon nitride. Alumina membranes having thicknesses between 300 and 1000 nm were prepared analogously using a lithographic process to produce free-standing porous alumina films that were peripherally supported on a 500-μm-thick silicon substrate.

Original languageEnglish
Pages (from-to)767-770
Number of pages4
JournalNano letters
Issue number5
Publication statusPublished - May 1 2004


ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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