Fabrication of ordered metallic nanocluster arrays using a focused ion beam

Matthew D. McMahon, Anthony B. Hmelo, Rene Lopez, Wesley T. Ryle, Allen T. Newton, Richard F. Haglund, Leonard C Feldman, Robert A. Weller, Robert H. Magruder

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have fabricated ordered arrays of gold nanocrystals on FIB-processed silicon substrates using electroless deposition. We have also fabricated ordered arrays of silver nanocrystals on silicon with diameters 40-60 nm separated by 180 nm center-to-center, using pulsed-laser deposition (PLD) to deposit silver on the substrate. The metal nanocrystal arrays are characterized using SEM as well as AFM and energy dispersive x-ray (EDX) analysis. AFM confirms particle sizes measured in SEM, and EDX analysis demonstrates that Ag preferentially clusters at sites that have been damaged by the ion beam. These results suggest that the FIB-PLD combination can be used to create ordered arrays of Ag nanocrystals with diameters of 10 nm or less.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsT.M. Orlando, L. Merhari, D.P. Taylor, K. Ikuta
Pages53-58
Number of pages6
Volume739
Publication statusPublished - 2002
EventThree-Dimensional Nanoengineered Assemblies - Boston, MA, United States
Duration: Dec 1 2002Dec 5 2002

Other

OtherThree-Dimensional Nanoengineered Assemblies
CountryUnited States
CityBoston, MA
Period12/1/0212/5/02

Fingerprint

Nanoclusters
Focused ion beams
Nanocrystals
Fabrication
Silicon
Pulsed laser deposition
Silver deposits
X rays
Scanning electron microscopy
Electroless plating
Substrates
Silver
Gold
Ion beams
Metals
Particle size

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

McMahon, M. D., Hmelo, A. B., Lopez, R., Ryle, W. T., Newton, A. T., Haglund, R. F., ... Magruder, R. H. (2002). Fabrication of ordered metallic nanocluster arrays using a focused ion beam. In T. M. Orlando, L. Merhari, D. P. Taylor, & K. Ikuta (Eds.), Materials Research Society Symposium - Proceedings (Vol. 739, pp. 53-58)

Fabrication of ordered metallic nanocluster arrays using a focused ion beam. / McMahon, Matthew D.; Hmelo, Anthony B.; Lopez, Rene; Ryle, Wesley T.; Newton, Allen T.; Haglund, Richard F.; Feldman, Leonard C; Weller, Robert A.; Magruder, Robert H.

Materials Research Society Symposium - Proceedings. ed. / T.M. Orlando; L. Merhari; D.P. Taylor; K. Ikuta. Vol. 739 2002. p. 53-58.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

McMahon, MD, Hmelo, AB, Lopez, R, Ryle, WT, Newton, AT, Haglund, RF, Feldman, LC, Weller, RA & Magruder, RH 2002, Fabrication of ordered metallic nanocluster arrays using a focused ion beam. in TM Orlando, L Merhari, DP Taylor & K Ikuta (eds), Materials Research Society Symposium - Proceedings. vol. 739, pp. 53-58, Three-Dimensional Nanoengineered Assemblies, Boston, MA, United States, 12/1/02.
McMahon MD, Hmelo AB, Lopez R, Ryle WT, Newton AT, Haglund RF et al. Fabrication of ordered metallic nanocluster arrays using a focused ion beam. In Orlando TM, Merhari L, Taylor DP, Ikuta K, editors, Materials Research Society Symposium - Proceedings. Vol. 739. 2002. p. 53-58
McMahon, Matthew D. ; Hmelo, Anthony B. ; Lopez, Rene ; Ryle, Wesley T. ; Newton, Allen T. ; Haglund, Richard F. ; Feldman, Leonard C ; Weller, Robert A. ; Magruder, Robert H. / Fabrication of ordered metallic nanocluster arrays using a focused ion beam. Materials Research Society Symposium - Proceedings. editor / T.M. Orlando ; L. Merhari ; D.P. Taylor ; K. Ikuta. Vol. 739 2002. pp. 53-58
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