Fabrication of self-aligned side gates to carbon nanotubes

L. A W Robinson, S. B. Lee, K. B K Teo, Manish Chhowalla, G. A J Amaratunga, W. I. Milne, D. A. Williams, D. G. Hasko, H. Ahmed

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.

Original languageEnglish
Pages (from-to)290-293
Number of pages4
JournalNanotechnology
Volume14
Issue number2
DOIs
Publication statusPublished - Feb 2003

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Carbon Nanotubes
Nanotubes
Carbon nanotubes
Metals
carbon nanotubes
Fabrication
fabrication
nanotubes
Shielding
Masks
metals
shielding
Substrates
masks
spacing

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Robinson, L. A. W., Lee, S. B., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., ... Ahmed, H. (2003). Fabrication of self-aligned side gates to carbon nanotubes. Nanotechnology, 14(2), 290-293. https://doi.org/10.1088/0957-4484/14/2/336

Fabrication of self-aligned side gates to carbon nanotubes. / Robinson, L. A W; Lee, S. B.; Teo, K. B K; Chhowalla, Manish; Amaratunga, G. A J; Milne, W. I.; Williams, D. A.; Hasko, D. G.; Ahmed, H.

In: Nanotechnology, Vol. 14, No. 2, 02.2003, p. 290-293.

Research output: Contribution to journalArticle

Robinson, LAW, Lee, SB, Teo, KBK, Chhowalla, M, Amaratunga, GAJ, Milne, WI, Williams, DA, Hasko, DG & Ahmed, H 2003, 'Fabrication of self-aligned side gates to carbon nanotubes', Nanotechnology, vol. 14, no. 2, pp. 290-293. https://doi.org/10.1088/0957-4484/14/2/336
Robinson LAW, Lee SB, Teo KBK, Chhowalla M, Amaratunga GAJ, Milne WI et al. Fabrication of self-aligned side gates to carbon nanotubes. Nanotechnology. 2003 Feb;14(2):290-293. https://doi.org/10.1088/0957-4484/14/2/336
Robinson, L. A W ; Lee, S. B. ; Teo, K. B K ; Chhowalla, Manish ; Amaratunga, G. A J ; Milne, W. I. ; Williams, D. A. ; Hasko, D. G. ; Ahmed, H. / Fabrication of self-aligned side gates to carbon nanotubes. In: Nanotechnology. 2003 ; Vol. 14, No. 2. pp. 290-293.
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