Fabrication of self-aligned side gates to carbon nanotubes

L. A.W. Robinson, S. B. Lee, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. A. Williams, D. G. Hasko, H. Ahmed

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12 Citations (Scopus)

Abstract

We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.

Original languageEnglish
Pages (from-to)290-293
Number of pages4
JournalNanotechnology
Volume14
Issue number2
DOIs
Publication statusPublished - Feb 1 2003

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ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Robinson, L. A. W., Lee, S. B., Teo, K. B. K., Chhowalla, M., Amaratunga, G. A. J., Milne, W. I., Williams, D. A., Hasko, D. G., & Ahmed, H. (2003). Fabrication of self-aligned side gates to carbon nanotubes. Nanotechnology, 14(2), 290-293. https://doi.org/10.1088/0957-4484/14/2/336