Fabrication of self-aligned side gates to carbon nanotubes

L. A.W. Robinson, S. B. Lee, K. B.K. Teo, M. Chhowalla, G. A.J. Amaratunga, W. I. Milne, D. A. Williams, D. G. Hasko, H. Ahmed

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.

Original languageEnglish
Pages (from-to)290-293
Number of pages4
Issue number2
Publication statusPublished - Feb 2003

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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