Field emission vacuum power switch using vertically aligned carbon nanotubes

N. L. Rupesinghe, Manish Chhowalla, K. B K Teo, G. A J Amaratunga

Research output: Contribution to journalArticle

32 Citations (Scopus)

Abstract

The best field emission properties from carbon nanotube cathodes were obtained when their heights, diameters and spacings were optimized. Field emission currents as high as 10 mA were obtained from 1 cm × 1 cm vertically aligned CNT cathode with optimized parameters grown using dc plasma CVD in situ. It was found that in order to obtain large emission current of >10 mA, space charge effects within the electron beam must be taken into account.

Original languageEnglish
Pages (from-to)338-343
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number1 SPEC.
DOIs
Publication statusPublished - Jan 2003

Fingerprint

Field emission
field emission
Carbon nanotubes
Cathodes
switches
cathodes
carbon nanotubes
Switches
Vacuum
Plasma CVD
vacuum
Electric space charge
space charge
Electron beams
spacing
vapor deposition
electron beams

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Field emission vacuum power switch using vertically aligned carbon nanotubes. / Rupesinghe, N. L.; Chhowalla, Manish; Teo, K. B K; Amaratunga, G. A J.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 21, No. 1 SPEC., 01.2003, p. 338-343.

Research output: Contribution to journalArticle

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