Fundamentals of nanoscale film analysis

Terry L. Alford, Leonard C Feldman, James W. Mayer

Research output: Book/ReportBook

46 Citations (Scopus)

Abstract

Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the structure and composition of the surface and the outer few tens to hundred nanometers in depth. It describes characterization techniques to quantify the structure, composition and depth distribution of materials with the use of energetic particles and photons. The book describes the fundamentals of materials characterization from the standpoint of the incident photons or particles which interrogate nanoscale structures. These induced reactions lead to the emission of a variety of detected of particles and photons. It is the energy and intensity of the detected beams that is the basis of the characterization of the materials. The array of experimental techniques used in nanoscale materials analysis covers a wide range of incident particle and detected beam interactions. Included are such important interactions as atomic collisions, Rutherford backscattering, ion channeling, diffraction, photon absorption, radiative and nonradiative transitions, and nuclear reactions. A variety of analytical and scanning probe microscopy techniques are presented in detail.

Original languageEnglish
PublisherSpringer US
Number of pages338
ISBN (Print)0387292608, 9780387292601
DOIs
Publication statusPublished - 2007

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Photons
Scanning probe microscopy
Nuclear reactions
Rutherford backscattering spectroscopy
Materials science
Field effect transistors
Chemical analysis
Integrated circuits
Diffraction
Ions
Thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Chemistry(all)

Cite this

Fundamentals of nanoscale film analysis. / Alford, Terry L.; Feldman, Leonard C; Mayer, James W.

Springer US, 2007. 338 p.

Research output: Book/ReportBook

Alford, Terry L. ; Feldman, Leonard C ; Mayer, James W. / Fundamentals of nanoscale film analysis. Springer US, 2007. 338 p.
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