The authors report on the spontaneous photon emission characteristics from Er in a Si/SiO2 cavity. They have realized Er-implanted resonant Fabry-Perot cavities consisting of SiO2 active regions and two Si/SiO2 distributed Bragg reflectors. Er was incorporated into the center SiO2 layer by ion implantation. Cavity-quality factors exceeding Q = 300 were achieved. Photoluminescence at room-temperature revealed a drastic enhancement of the luminescence intensity emitted along the optical axis of the cavity. The intensity of the resonant cavity structures was typically 1-2 orders of magnitude higher as compared to structures without a cavity.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)