Grazing incidence X-ray absorption characterization of amorphous Zn-Sn-O thin film

S. L. Moffitt, Q. Ma, D. B. Buchholz, Robert P. H. Chang, M. J. Bedzyk, Thomas O Mason

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Abstract

We report a surface structure study of an amorphous Zn-Sn-O (a-ZTO) transparent conducting film using the grazing incidence X-ray absorption spectroscopy technique. By setting the measuring angles far below the critical angle at which the total external reflection occurs, the details of the surface structure of a film or bulk can be successfully accessed. The results show that unlike in the film where Zn is severely under coordinated (N <4), it is fully coordinated (N = 4) near the surface while the coordination number around Sn is slightly smaller near the surface than in the film. Despite a 30% Zn doping, the local structure in the film is rutile-like.

Original languageEnglish
Article number012116
JournalJournal of Physics: Conference Series
Volume712
Issue number1
DOIs
Publication statusPublished - 2016

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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