Growth and in situ x-ray characterization of YBa2Cu 3Ox/LaAlO3 superlattices

S. M. Williams, S. Maglic, C. Thomas, C. T. Lin, M. J. Wagoner, Robert P. H. Chang, J. B. Ketterson

Research output: Contribution to journalArticlepeer-review


We utilized a miniature sputtering cell with mylar windows and multitarget sputtering guns in order to study the growth of YBCO/LaAlO3 superlattices on SrTiO3 substrates. Computer modeling of the diffraction spectra enabled us to determine the interface width between the layers. After deposition of the superlattices, the substrate temperature was increased to study any interdiffusion.

Original languageEnglish
Pages (from-to)1485
Number of pages1
JournalApplied Physics Letters
Publication statusPublished - 1995

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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