Growth, interfacial alloying, and oxidation of ultra-thin Al films on Ru(0001)

Yutong Wu, Hui Shu Tao, Eric Garfunkel, Theodore E. Madey, Neal D. Shinn

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

The growth and oxidation of ultra-thin aluminum films on Ru(0001) have been studied by low energy ion scattering (LEIS) and X-ray photoelectron spectroscopy (XPS) using both Mg K α and synchrotron soft X-ray radiation. For Al films of average thickness ∼ 15 A ̊ deposited at 300 K, LEIS demonstrates that the Ru substrate is completely covered. Upon annealing to ∼ 1000 K LEIS shows the reappearance of Ru at the surface. At the same time, the metallic Al 2p peak shifts to lower binding energy and a low binding energy shoulder appears on the Ru 3d peak, suggesting Al Ru interfacial alloying. Annealing Al films to ∼ 1000 K in 1 × 10-4 Torr oxygen produces an oxidized surface layer that completely covers the Ru substrate; the resultant aluminum oxide films are stoichiometric.

Original languageEnglish
Pages (from-to)123-139
Number of pages17
JournalSurface Science
Volume336
Issue number1-2
DOIs
Publication statusPublished - Aug 1 1995

Fingerprint

Ultrathin films
ion scattering
Alloying
alloying
Scattering
Ions
Binding energy
Oxidation
oxidation
thin films
binding energy
Annealing
Aluminum
annealing
Aluminum Oxide
Substrates
shoulders
Synchrotrons
Oxide films
oxide films

Keywords

  • Aluminum
  • Aluminum oxide
  • Ceramic thin films
  • Low energy ion scattering (LEIS)
  • Ruthenium
  • X-ray photoelectron spectroscopy (XPS)

ASJC Scopus subject areas

  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Physical and Theoretical Chemistry

Cite this

Growth, interfacial alloying, and oxidation of ultra-thin Al films on Ru(0001). / Wu, Yutong; Tao, Hui Shu; Garfunkel, Eric; Madey, Theodore E.; Shinn, Neal D.

In: Surface Science, Vol. 336, No. 1-2, 01.08.1995, p. 123-139.

Research output: Contribution to journalArticle

Wu, Yutong ; Tao, Hui Shu ; Garfunkel, Eric ; Madey, Theodore E. ; Shinn, Neal D. / Growth, interfacial alloying, and oxidation of ultra-thin Al films on Ru(0001). In: Surface Science. 1995 ; Vol. 336, No. 1-2. pp. 123-139.
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