Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering

E. P. Gusev, H. C. Lu, T. Gustafsson, Eric Garfunkel

Research output: Contribution to journalArticle

207 Citations (Scopus)

Fingerprint Dive into the research topics of 'Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy