Growth of graphene-like structures on an oxidized sic surface

Weijie Lu, W. C. Mitchel, J. J. Boeckl, Tiffany R. Crenshaw, W. E. Collins, Robert P. H. Chang, Leonard C Feldman

Research output: Contribution to journal › Article

7 Citations (Scopus)

Abstract

Graphene-like structures were formed on an oxidized SiC (0001) surface following thermal annealing in a vacuum at high temperatures. The SiO 2/SiC structure was annealed at 1350°C in 10 -5 Torr; the SiO 2 layer was vaporized, and two layer graphene-like structures were formed on the SiC surface. This method of fabricating graphene did not require an ultra-high vacuum. In the absence of the oxide layer, a film of vertical carbon nanotubes (CNTs) was grown on the SiC surface in the same temperature range at 10 -5 Torr.

Original languageEnglish
Pages (from-to)731-736
Number of pages6
JournalJournal of Electronic Materials
Volume38
Issue number6
DOIs
Publication statusPublished - Jun 2009

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Graphene
graphene
Carbon Nanotubes
Ultrahigh vacuum
Oxides
ultrahigh vacuum
Carbon nanotubes
carbon nanotubes
Vacuum
Annealing
Temperature
vacuum
annealing
oxides
temperature

Keywords

  • Carbon nanotubes
  • Graphene growth
  • SiC
  • Surface structures

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

Growth of graphene-like structures on an oxidized sic surface. / Lu, Weijie; Mitchel, W. C.; Boeckl, J. J.; Crenshaw, Tiffany R.; Collins, W. E.; Chang, Robert P. H.; Feldman, Leonard C.

In: Journal of Electronic Materials, Vol. 38, No. 6, 06.2009, p. 731-736.

Research output: Contribution to journal › Article

Lu, W, Mitchel, WC, Boeckl, JJ, Crenshaw, TR, Collins, WE, Chang, RPH & Feldman, LC 2009, 'Growth of graphene-like structures on an oxidized sic surface', Journal of Electronic Materials, vol. 38, no. 6, pp. 731-736. https://doi.org/10.1007/s11664-009-0715-5
Lu W, Mitchel WC, Boeckl JJ, Crenshaw TR, Collins WE, Chang RPH et al. Growth of graphene-like structures on an oxidized sic surface. Journal of Electronic Materials. 2009 Jun;38(6):731-736. https://doi.org/10.1007/s11664-009-0715-5
Lu, Weijie ; Mitchel, W. C. ; Boeckl, J. J. ; Crenshaw, Tiffany R. ; Collins, W. E. ; Chang, Robert P. H. ; Feldman, Leonard C. / Growth of graphene-like structures on an oxidized sic surface. In: Journal of Electronic Materials. 2009 ; Vol. 38, No. 6. pp. 731-736.
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