### Abstract

The process of step-mediated growth in molecular beam epitaxy, where deposited atoms move along surface terraces until they eventually bind at a surface step, is currently being explored as a mechanism for forming two-dimensional periodic structures. To succeed, such schemes require a periodic step distribution, i.e., uniform terrace lengths. A model, based on step-mediated growth, is presented, which yields an analytical derivation of the approach to uniform terrace lengths on a stepped surface, given a terrace length distribution of finite width at the outset. The results show that the approach to uniform terrace lengths with increasing deposition is quite slow. The width of the terrace length distribution varies approximately as the inverse fourth root of the deposited coverage. This will only occur if the atoms attach themselves predominately at the up-step of each terrace. Otherwise, the width of the terrace length distribution will grow without bounds.

Original language | English |
---|---|

Pages (from-to) | 3516-3519 |

Number of pages | 4 |

Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |

Volume | 8 |

Issue number | 4 |

DOIs | |

Publication status | Published - Jul 1 1990 |

### Fingerprint

### Keywords

- Analytical solution
- Deposition
- Film growth
- Molecular beam epitaxy
- Superlattices
- Surface structure

### ASJC Scopus subject areas

- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films

### Cite this

*Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films*,

*8*(4), 3516-3519. https://doi.org/10.1116/1.576499

**Growth of multidimensional superlattices using step array templates : Evolution of the terrace size distribution.** / Gossmann, H. J.; Sinden, F. W.; Feldman, Leonard C.

Research output: Contribution to journal › Article

*Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films*, vol. 8, no. 4, pp. 3516-3519. https://doi.org/10.1116/1.576499

}

TY - JOUR

T1 - Growth of multidimensional superlattices using step array templates

T2 - Evolution of the terrace size distribution

AU - Gossmann, H. J.

AU - Sinden, F. W.

AU - Feldman, Leonard C

PY - 1990/7/1

Y1 - 1990/7/1

N2 - The process of step-mediated growth in molecular beam epitaxy, where deposited atoms move along surface terraces until they eventually bind at a surface step, is currently being explored as a mechanism for forming two-dimensional periodic structures. To succeed, such schemes require a periodic step distribution, i.e., uniform terrace lengths. A model, based on step-mediated growth, is presented, which yields an analytical derivation of the approach to uniform terrace lengths on a stepped surface, given a terrace length distribution of finite width at the outset. The results show that the approach to uniform terrace lengths with increasing deposition is quite slow. The width of the terrace length distribution varies approximately as the inverse fourth root of the deposited coverage. This will only occur if the atoms attach themselves predominately at the up-step of each terrace. Otherwise, the width of the terrace length distribution will grow without bounds.

AB - The process of step-mediated growth in molecular beam epitaxy, where deposited atoms move along surface terraces until they eventually bind at a surface step, is currently being explored as a mechanism for forming two-dimensional periodic structures. To succeed, such schemes require a periodic step distribution, i.e., uniform terrace lengths. A model, based on step-mediated growth, is presented, which yields an analytical derivation of the approach to uniform terrace lengths on a stepped surface, given a terrace length distribution of finite width at the outset. The results show that the approach to uniform terrace lengths with increasing deposition is quite slow. The width of the terrace length distribution varies approximately as the inverse fourth root of the deposited coverage. This will only occur if the atoms attach themselves predominately at the up-step of each terrace. Otherwise, the width of the terrace length distribution will grow without bounds.

KW - Analytical solution

KW - Deposition

KW - Film growth

KW - Molecular beam epitaxy

KW - Superlattices

KW - Surface structure

UR - http://www.scopus.com/inward/record.url?scp=84913053271&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84913053271&partnerID=8YFLogxK

U2 - 10.1116/1.576499

DO - 10.1116/1.576499

M3 - Article

AN - SCOPUS:84913053271

VL - 8

SP - 3516

EP - 3519

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 4

ER -