Abstract
Low pressure organometallic chemical vapor deposition was used to prepare ferroelectric thin films. Both the bismuth and the strontium titanate system were investigated. Under the optimal growth conditions phase pure, textured films could be prepared. The growth parameters which influenced composition and phase stability were examined.
Original language | English |
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Pages (from-to) | 712-715 |
Number of pages | 4 |
Journal | Journal of Crystal Growth |
Volume | 107 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - Jan 1 1991 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry