High aspect ratio nanoneedle probes with an integrated electrode at the tip apex

David J. Comstock, Jeffrey W. Elam, Michael J. Pellin, Mark C Hersam

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Many nanoscale characterization techniques require high aspect ratio nanoneedle probes with an integrated electrode that is electrically insulated everywhere except at the tip apex. We report the utilization of electron beam induced deposition, focused ion beam milling, and atomic layer deposition to fabricate such probes at the sub-100 nm length scale. This fabrication method is highly reproducible and enables precise control of the probe dimensions. Subsequent electrodeposition at the integrated electrode enables customized functionalization of the tip apex. These probes have clear applications in scanning electrochemical microscopy-atomic force microscopy, magnetic force microscopy, apertureless near-field optical microscopy, and tip-enhanced Raman spectroscopy.

Original languageEnglish
Article number113704
JournalReview of Scientific Instruments
Volume83
Issue number11
DOIs
Publication statusPublished - Nov 2012

Fingerprint

Nanoneedles
high aspect ratio
Aspect ratio
apexes
Electrodes
electrodes
probes
Magnetic force microscopy
microscopy
Atomic layer deposition
magnetic force microscopy
Focused ion beams
atomic layer epitaxy
Electrodeposition
electrodeposition
Optical microscopy
Raman spectroscopy
Electron beams
Atomic force microscopy
near fields

ASJC Scopus subject areas

  • Instrumentation

Cite this

High aspect ratio nanoneedle probes with an integrated electrode at the tip apex. / Comstock, David J.; Elam, Jeffrey W.; Pellin, Michael J.; Hersam, Mark C.

In: Review of Scientific Instruments, Vol. 83, No. 11, 113704, 11.2012.

Research output: Contribution to journalArticle

Comstock, David J. ; Elam, Jeffrey W. ; Pellin, Michael J. ; Hersam, Mark C. / High aspect ratio nanoneedle probes with an integrated electrode at the tip apex. In: Review of Scientific Instruments. 2012 ; Vol. 83, No. 11.
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