High Resolution Assembly of Patterned Metal Oxide Thin Films via Microtransfer Molding and Electrochemical Deposition Techniques

Keith J. Stevenson, Greta J. Hurtt, Joseph T. Hupp

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

A versatile method for preparing patterned thin films of metal oxides (MoO3 and WO3) and related materials on transparent, conductive indium-tin oxide (ITO) glass platforms is reported. Micrometer-sized features are formed by microtransfer molding of an optically transparent, thermally curable epoxy on ITO substrates followed by cathodic electrodeposition of the metal oxide from aqueous metal-hydrogen peroxide solutions. Atomic force microscopy was used to characterize the resulting microstructure and to examine effects of sintering on the patterned thin films.

Original languageEnglish
Pages (from-to)175-177
Number of pages3
JournalElectrochemical and Solid-State Letters
Volume2
Issue number2-4
DOIs
Publication statusPublished - Apr 1999

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

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