High-rotational symmetry lattices fabricated by Moiré nanolithography

Steven M. Lubin, Wei Zhou, Alexander J. Hryn, Mark D. Huntington, Teri W Odom

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

This paper describes a new nanofabrication method, moiré nanolithography, that can fabricate subwavelength lattices with high-rotational symmetries. By exposing elastomeric photomasks sequentially at multiple offset angles, we created arrays with rotational symmetries as high as 36-fold, which is three times higher than quasiperiodic lattices (≥12-fold) and six times higher than two-dimensional periodic lattices (≥6-fold). Because these moiré nanopatterns can be generated over wafer-scale areas, they are promising for a range of photonic applications, especially those that require broadband, omnidirectional absorption of visible light.

Original languageEnglish
Pages (from-to)4948-4952
Number of pages5
JournalNano Letters
Volume12
Issue number9
DOIs
Publication statusPublished - Sep 12 2012

Fingerprint

Nanolithography
Photomasks
Nanotechnology
Photonics
symmetry
photomasks
nanofabrication
wafers
photonics
broadband
elastomeric

Keywords

  • high rotational symmetry lattices
  • moiré patterns
  • Nanopatterning
  • quasiperiodic
  • soft lithography

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanical Engineering

Cite this

High-rotational symmetry lattices fabricated by Moiré nanolithography. / Lubin, Steven M.; Zhou, Wei; Hryn, Alexander J.; Huntington, Mark D.; Odom, Teri W.

In: Nano Letters, Vol. 12, No. 9, 12.09.2012, p. 4948-4952.

Research output: Contribution to journalArticle

Lubin, SM, Zhou, W, Hryn, AJ, Huntington, MD & Odom, TW 2012, 'High-rotational symmetry lattices fabricated by Moiré nanolithography', Nano Letters, vol. 12, no. 9, pp. 4948-4952. https://doi.org/10.1021/nl302535p
Lubin, Steven M. ; Zhou, Wei ; Hryn, Alexander J. ; Huntington, Mark D. ; Odom, Teri W. / High-rotational symmetry lattices fabricated by Moiré nanolithography. In: Nano Letters. 2012 ; Vol. 12, No. 9. pp. 4948-4952.
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