Abstract
Deuterium adsorption on the clean Si(111)-(7 multiplied by 7) surface was quantitatively studied by determining the absolute coverage as a function of exposure using nuclear microanalysis. The coverage was correlated with structural changes observed by low energy diffraction and the high energy ion scattering surface peak. A saturation coverage of 1. 25 plus or minus 0. 13 monolayers was established for activated deuterium adsorption.
Original language | English |
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Pages (from-to) | 868-871 |
Number of pages | 4 |
Journal | Journal of vacuum science & technology |
Volume | 20 |
Issue number | 3 |
DOIs | |
Publication status | Published - Mar 1981 |
ASJC Scopus subject areas
- Engineering(all)