Deuterium adsorption on the clean Si(111)-(7 multiplied by 7) surface was quantitatively studied by determining the absolute coverage as a function of exposure using nuclear microanalysis. The coverage was correlated with structural changes observed by low energy diffraction and the high energy ion scattering surface peak. A saturation coverage of 1. 25 plus or minus 0. 13 monolayers was established for activated deuterium adsorption.
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