HYDROGEN ADSORPTION ON Si(110)-(7 multiplied by 7).

R. J. Culbertson, Leonard C Feldman, P. J. Silverman, R. Haight

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Abstract

Deuterium adsorption on the clean Si(111)-(7 multiplied by 7) surface was quantitatively studied by determining the absolute coverage as a function of exposure using nuclear microanalysis. The coverage was correlated with structural changes observed by low energy diffraction and the high energy ion scattering surface peak. A saturation coverage of 1. 25 plus or minus 0. 13 monolayers was established for activated deuterium adsorption.

Original languageEnglish
Pages (from-to)868-871
Number of pages4
JournalJournal of vacuum science & technology
Volume20
Issue number3
DOIs
Publication statusPublished - Mar 1981

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ASJC Scopus subject areas

  • Engineering(all)

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