Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy

Ryan A. Hackler, Michael O. McAnally, George C Schatz, Peter C Stair, Richard P. Van Duyne

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Fingerprint Dive into the research topics of 'Identification of Dimeric Methylalumina Surface Species during Atomic Layer Deposition Using Operando Surface-Enhanced Raman Spectroscopy'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Medicine & Life Sciences