@inproceedings{99adb23f90174b798c8b08f71692d982,
title = "Impact of nitridation on negative and positive charge buildup in SiC gate oxides",
author = "John Rozen and Sarit Dhar and Williams, {John R.} and Feldman, {Leonard C.}",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/ISDRS.2007.4422265",
language = "English",
isbn = "1424418917",
series = "2007 International Semiconductor Device Research Symposium, ISDRS",
booktitle = "2007 International Semiconductor Device Research Symposium, ISDRS",
note = "2007 International Semiconductor Device Research Symposium, ISDRS ; Conference date: 12-12-2007 Through 14-12-2007",
}