Impact of nitridation on negative and positive charge buildup in SiC gate oxides

John Rozen, Sarit Dhar, John R. Williams, Leonard C Feldman

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original languageEnglish
Title of host publication2007 International Semiconductor Device Research Symposium, ISDRS
DOIs
Publication statusPublished - 2007
Event2007 International Semiconductor Device Research Symposium, ISDRS - College Park, MD, United States
Duration: Dec 12 2007 → Dec 14 2007

Other

Other2007 International Semiconductor Device Research Symposium, ISDRS
CountryUnited States
CityCollege Park, MD
Period12/12/07 → 12/14/07

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Nitridation
Oxides

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Rozen, J., Dhar, S., Williams, J. R., & Feldman, L. C. (2007). Impact of nitridation on negative and positive charge buildup in SiC gate oxides. In 2007 International Semiconductor Device Research Symposium, ISDRS [4422265] https://doi.org/10.1109/ISDRS.2007.4422265

Impact of nitridation on negative and positive charge buildup in SiC gate oxides. / Rozen, John; Dhar, Sarit; Williams, John R.; Feldman, Leonard C.

2007 International Semiconductor Device Research Symposium, ISDRS. 2007. 4422265.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Rozen, J, Dhar, S, Williams, JR & Feldman, LC 2007, Impact of nitridation on negative and positive charge buildup in SiC gate oxides. in 2007 International Semiconductor Device Research Symposium, ISDRS., 4422265, 2007 International Semiconductor Device Research Symposium, ISDRS, College Park, MD, United States, 12/12/07. https://doi.org/10.1109/ISDRS.2007.4422265
Rozen J, Dhar S, Williams JR, Feldman LC. Impact of nitridation on negative and positive charge buildup in SiC gate oxides. In 2007 International Semiconductor Device Research Symposium, ISDRS. 2007. 4422265 https://doi.org/10.1109/ISDRS.2007.4422265
Rozen, John ; Dhar, Sarit ; Williams, John R. ; Feldman, Leonard C. / Impact of nitridation on negative and positive charge buildup in SiC gate oxides. 2007 International Semiconductor Device Research Symposium, ISDRS. 2007.
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