Improved pattern transfer in soft lithography using composite stamps

Teri W. Odom, J. Christopher Love, Daniel B. Wolfe, Kateri E. Paul, George M. Whitesides

Research output: Contribution to journalArticle

594 Citations (Scopus)

Abstract

Composite stamps composed of two layers-a stiff layer supported by a flexible layer-extend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques-micromolding in capillaries, microtransfer molding, and phase-shifting lithography-can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

Original languageEnglish
Pages (from-to)5314-5320
Number of pages7
JournalLangmuir
Volume18
Issue number13
DOIs
Publication statusPublished - Jun 25 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Spectroscopy
  • Electrochemistry

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    Odom, T. W., Love, J. C., Wolfe, D. B., Paul, K. E., & Whitesides, G. M. (2002). Improved pattern transfer in soft lithography using composite stamps. Langmuir, 18(13), 5314-5320. https://doi.org/10.1021/la020169l