Improved pattern transfer in soft lithography using composite stamps

Teri W Odom, J. Christopher Love, Daniel B. Wolfe, Kateri E. Paul, George M. Whitesides

Research output: Contribution to journalArticle

560 Citations (Scopus)

Abstract

Composite stamps composed of two layers-a stiff layer supported by a flexible layer-extend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques-micromolding in capillaries, microtransfer molding, and phase-shifting lithography-can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

Original languageEnglish
Pages (from-to)5314-5320
Number of pages7
JournalLangmuir
Volume18
Issue number13
DOIs
Publication statusPublished - Jun 25 2002

Fingerprint

Lithography
lithography
composite materials
Composite materials
Polydimethylsiloxane
Macromolecules
Molding
Printing
macromolecules
printing
preparation
baysilon

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Colloid and Surface Chemistry

Cite this

Odom, T. W., Love, J. C., Wolfe, D. B., Paul, K. E., & Whitesides, G. M. (2002). Improved pattern transfer in soft lithography using composite stamps. Langmuir, 18(13), 5314-5320. https://doi.org/10.1021/la020169l

Improved pattern transfer in soft lithography using composite stamps. / Odom, Teri W; Love, J. Christopher; Wolfe, Daniel B.; Paul, Kateri E.; Whitesides, George M.

In: Langmuir, Vol. 18, No. 13, 25.06.2002, p. 5314-5320.

Research output: Contribution to journalArticle

Odom, TW, Love, JC, Wolfe, DB, Paul, KE & Whitesides, GM 2002, 'Improved pattern transfer in soft lithography using composite stamps', Langmuir, vol. 18, no. 13, pp. 5314-5320. https://doi.org/10.1021/la020169l
Odom TW, Love JC, Wolfe DB, Paul KE, Whitesides GM. Improved pattern transfer in soft lithography using composite stamps. Langmuir. 2002 Jun 25;18(13):5314-5320. https://doi.org/10.1021/la020169l
Odom, Teri W ; Love, J. Christopher ; Wolfe, Daniel B. ; Paul, Kateri E. ; Whitesides, George M. / Improved pattern transfer in soft lithography using composite stamps. In: Langmuir. 2002 ; Vol. 18, No. 13. pp. 5314-5320.
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