In situ growth of epitaxial YAlO3 thin films by metal-organic chemical vapor deposition

Bin Han; Deborah A. Neumayer; Douglas L. Schulz; Bruce J. Hinds; Tobin J Marks; Hong Zhang; Vinayak P. Dravid

In situ growth of epitaxial YAlO₃ thin films by metal-organic chemical vapor deposition

Bin Han, Deborah A. Neumayer, Douglas L. Schulz, Bruce J. Hinds, Tobin J Marks, Hong Zhang, Vinayak P. Dravid

Northwestern University

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	14-16
Number of pages	3
Journal	Chemistry of Materials
Volume	5
Issue number	1
Publication status	Published - 1993

ASJC Scopus subject areas

Materials Chemistry
Materials Science(all)

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Han, B., Neumayer, D. A., Schulz, D. L., Hinds, B. J., Marks, T. J., Zhang, H., & Dravid, V. P. (1993). In situ growth of epitaxial YAlO₃ thin films by metal-organic chemical vapor deposition. Chemistry of Materials, 5(1), 14-16.

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author = "Bin Han and Neumayer, {Deborah A.} and Schulz, {Douglas L.} and Hinds, {Bruce J.} and Marks, {Tobin J} and Hong Zhang and Dravid, {Vinayak P.}",

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AU - Zhang, Hong

AU - Dravid, Vinayak P.

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