A versatile ellipsometer with variable energy (1. 5-5. 6 eV) and angle of incidence (60 degree -75 degree ) has been constructed for in situ thin film diagnostics on a linear plasma reactor. Such information as the rate of oxidation, transient effects, uniformity, and optical absorption of the oxide layer are obtained during plasma processing. The oxidation process can be interrupted at any moment for examining the sample as a function of energy and angle of incidence. A multilayer analysis is presented to determine (i) the dielectric function and the thickness of the oxide layer, and (ii) the composition and the thickness of the interface region between the oxide and the GaAs substrate. The effect of the rate of plasma oxidation on the oxide properties is also discussed.
|Number of pages||8|
|Journal||Journal of the Electrochemical Society|
|Publication status||Published - Feb 1980|
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Surfaces and Interfaces