In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

J. Q. Zheng, X. K. Wang, M. C. Shih, S. Williams, J. So, S. J. Lee, P. Dutta, Robert P. H. Chang, J. B. Ketterson

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Abstract

We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

Original languageEnglish
Pages (from-to)2303-2305
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number20
DOIs
Publication statusPublished - 1991

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Zheng, J. Q., Wang, X. K., Shih, M. C., Williams, S., So, J., Lee, S. J., Dutta, P., Chang, R. P. H., & Ketterson, J. B. (1991). In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth. Applied Physics Letters, 58(20), 2303-2305. https://doi.org/10.1063/1.104906