In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

J. Q. Zheng, X. K. Wang, M. C. Shih, S. Williams, J. So, S. J. Lee, P. Dutta, Robert P. H. Chang, J. B. Ketterson

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

Original languageEnglish
Pages (from-to)2303-2305
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number20
DOIs
Publication statusPublished - 1991

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magnetron sputtering
synchrotrons
thin films
x rays
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Zheng, J. Q., Wang, X. K., Shih, M. C., Williams, S., So, J., Lee, S. J., ... Ketterson, J. B. (1991). In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth. Applied Physics Letters, 58(20), 2303-2305. https://doi.org/10.1063/1.104906

In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth. / Zheng, J. Q.; Wang, X. K.; Shih, M. C.; Williams, S.; So, J.; Lee, S. J.; Dutta, P.; Chang, Robert P. H.; Ketterson, J. B.

In: Applied Physics Letters, Vol. 58, No. 20, 1991, p. 2303-2305.

Research output: Contribution to journalArticle

Zheng, JQ, Wang, XK, Shih, MC, Williams, S, So, J, Lee, SJ, Dutta, P, Chang, RPH & Ketterson, JB 1991, 'In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth', Applied Physics Letters, vol. 58, no. 20, pp. 2303-2305. https://doi.org/10.1063/1.104906
Zheng, J. Q. ; Wang, X. K. ; Shih, M. C. ; Williams, S. ; So, J. ; Lee, S. J. ; Dutta, P. ; Chang, Robert P. H. ; Ketterson, J. B. / In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth. In: Applied Physics Letters. 1991 ; Vol. 58, No. 20. pp. 2303-2305.
@article{cfef5f85b1aa4e359e2c01334c4640c3,
title = "In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth",
abstract = "We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.",
author = "Zheng, {J. Q.} and Wang, {X. K.} and Shih, {M. C.} and S. Williams and J. So and Lee, {S. J.} and P. Dutta and Chang, {Robert P. H.} and Ketterson, {J. B.}",
year = "1991",
doi = "10.1063/1.104906",
language = "English",
volume = "58",
pages = "2303--2305",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "20",

}

TY - JOUR

T1 - In situ synchrotron studies of the structural properties of Y-Ba-Cu-O thin films during growth

AU - Zheng, J. Q.

AU - Wang, X. K.

AU - Shih, M. C.

AU - Williams, S.

AU - So, J.

AU - Lee, S. J.

AU - Dutta, P.

AU - Chang, Robert P. H.

AU - Ketterson, J. B.

PY - 1991

Y1 - 1991

N2 - We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

AB - We report the first real time, in situ synchrotron x-ray studies of Y-Ba-Cu-O thin-film growth on (100) SrTiO3 using a miniature, faced-magnetron sputtering system. A combination of the substrate temperature and the deposition rate determines whether the film grows along the a, c, or multiple axes.

UR - http://www.scopus.com/inward/record.url?scp=0039191349&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0039191349&partnerID=8YFLogxK

U2 - 10.1063/1.104906

DO - 10.1063/1.104906

M3 - Article

AN - SCOPUS:0039191349

VL - 58

SP - 2303

EP - 2305

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 20

ER -