Abstract
Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.
Original language | English |
---|---|
Pages (from-to) | 4798-4804 |
Number of pages | 7 |
Journal | Journal of Applied Physics |
Volume | 72 |
Issue number | 10 |
DOIs | |
Publication status | Published - 1992 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)