In situ x-ray diffraction studies of YBa2Cu3O x

S. Williams, J. Q. Zheng, M. C. Shih, X. K. Wang, S. J. Lee, E. D. Rippert, S. Maglic, Hiroshi Kajiyama, D. Segel, P. Dutta, Robert P. H. Chang, J. B. Ketterson, T. Roberts, Y. Lin, R. T. Kampwirth, K. Gray

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.

Original languageEnglish
Pages (from-to)4798-4804
Number of pages7
JournalJournal of Applied Physics
Volume72
Issue number10
DOIs
Publication statusPublished - 1992

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x ray diffraction
partial pressure
magnetron sputtering
light sources
synchrotrons
chambers
curves
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Williams, S., Zheng, J. Q., Shih, M. C., Wang, X. K., Lee, S. J., Rippert, E. D., ... Gray, K. (1992). In situ x-ray diffraction studies of YBa2Cu3O x. Journal of Applied Physics, 72(10), 4798-4804. https://doi.org/10.1063/1.352093

In situ x-ray diffraction studies of YBa2Cu3O x. / Williams, S.; Zheng, J. Q.; Shih, M. C.; Wang, X. K.; Lee, S. J.; Rippert, E. D.; Maglic, S.; Kajiyama, Hiroshi; Segel, D.; Dutta, P.; Chang, Robert P. H.; Ketterson, J. B.; Roberts, T.; Lin, Y.; Kampwirth, R. T.; Gray, K.

In: Journal of Applied Physics, Vol. 72, No. 10, 1992, p. 4798-4804.

Research output: Contribution to journalArticle

Williams, S, Zheng, JQ, Shih, MC, Wang, XK, Lee, SJ, Rippert, ED, Maglic, S, Kajiyama, H, Segel, D, Dutta, P, Chang, RPH, Ketterson, JB, Roberts, T, Lin, Y, Kampwirth, RT & Gray, K 1992, 'In situ x-ray diffraction studies of YBa2Cu3O x', Journal of Applied Physics, vol. 72, no. 10, pp. 4798-4804. https://doi.org/10.1063/1.352093
Williams S, Zheng JQ, Shih MC, Wang XK, Lee SJ, Rippert ED et al. In situ x-ray diffraction studies of YBa2Cu3O x. Journal of Applied Physics. 1992;72(10):4798-4804. https://doi.org/10.1063/1.352093
Williams, S. ; Zheng, J. Q. ; Shih, M. C. ; Wang, X. K. ; Lee, S. J. ; Rippert, E. D. ; Maglic, S. ; Kajiyama, Hiroshi ; Segel, D. ; Dutta, P. ; Chang, Robert P. H. ; Ketterson, J. B. ; Roberts, T. ; Lin, Y. ; Kampwirth, R. T. ; Gray, K. / In situ x-ray diffraction studies of YBa2Cu3O x. In: Journal of Applied Physics. 1992 ; Vol. 72, No. 10. pp. 4798-4804.
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