In situ x-ray diffraction studies of YBa2Cu3O x

S. Williams; J. Q. Zheng; M. C. Shih; X. K. Wang; S. J. Lee; E. D. Rippert; S. Maglic; Hiroshi Kajiyama; D. Segel; P. Dutta; Robert P. H. Chang; J. B. Ketterson; T. Roberts; Y. Lin; R. T. Kampwirth; K. Gray

doi:10.1063/1.352093

In situ x-ray diffraction studies of YBa₂Cu₃O _x

S. Williams, J. Q. Zheng, M. C. Shih, X. K. Wang, S. J. Lee, E. D. Rippert, S. Maglic, Hiroshi Kajiyama, D. Segel, P. Dutta, Robert P. H. Chang, J. B. Ketterson, T. Roberts, Y. Lin, R. T. Kampwirth, K. Gray

Northwestern University

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa ₂Cu₃O_x films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O₂/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO₃, LaAlO₃, and MgO.

Original language	English
Pages (from-to)	4798-4804
Number of pages	7
Journal	Journal of Applied Physics
Volume	72
Issue number	10
DOIs	https://doi.org/10.1063/1.352093
Publication status	Published - 1992

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ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Cite this

Williams, S., Zheng, J. Q., Shih, M. C., Wang, X. K., Lee, S. J., Rippert, E. D., ... Gray, K. (1992). In situ x-ray diffraction studies of YBa₂Cu₃O _x. Journal of Applied Physics, 72(10), 4798-4804. https://doi.org/10.1063/1.352093

In situ x-ray diffraction studies of YBa₂Cu₃O _x. / Williams, S.; Zheng, J. Q.; Shih, M. C.; Wang, X. K.; Lee, S. J.; Rippert, E. D.; Maglic, S.; Kajiyama, Hiroshi; Segel, D.; Dutta, P.; Chang, Robert P. H.; Ketterson, J. B.; Roberts, T.; Lin, Y.; Kampwirth, R. T.; Gray, K.

In: Journal of Applied Physics, Vol. 72, No. 10, 1992, p. 4798-4804.

Research output: Contribution to journal › Article

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abstract = "Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.",

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AU - Rippert, E. D.

AU - Maglic, S.

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AU - Dutta, P.

AU - Chang, Robert P. H.

AU - Ketterson, J. B.

AU - Roberts, T.

AU - Lin, Y.

AU - Kampwirth, R. T.

AU - Gray, K.

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10.1063/1.352093