In situ x-ray diffraction studies of YBa2Cu3O x

S. Williams, J. Q. Zheng, M. C. Shih, X. K. Wang, S. J. Lee, E. D. Rippert, S. Maglic, Hiroshi Kajiyama, D. Segel, P. Dutta, Robert P. H. Chang, J. B. Ketterson, T. Roberts, Y. Lin, R. T. Kampwirth, K. Gray

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.

Original languageEnglish
Pages (from-to)4798-4804
Number of pages7
JournalJournal of Applied Physics
Volume72
Issue number10
DOIs
Publication statusPublished - 1992

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x ray diffraction
partial pressure
magnetron sputtering
light sources
synchrotrons
chambers
curves
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Williams, S., Zheng, J. Q., Shih, M. C., Wang, X. K., Lee, S. J., Rippert, E. D., ... Gray, K. (1992). In situ x-ray diffraction studies of YBa2Cu3O x. Journal of Applied Physics, 72(10), 4798-4804. https://doi.org/10.1063/1.352093

In situ x-ray diffraction studies of YBa2Cu3O x. / Williams, S.; Zheng, J. Q.; Shih, M. C.; Wang, X. K.; Lee, S. J.; Rippert, E. D.; Maglic, S.; Kajiyama, Hiroshi; Segel, D.; Dutta, P.; Chang, Robert P. H.; Ketterson, J. B.; Roberts, T.; Lin, Y.; Kampwirth, R. T.; Gray, K.

In: Journal of Applied Physics, Vol. 72, No. 10, 1992, p. 4798-4804.

Research output: Contribution to journal › Article

Williams, S, Zheng, JQ, Shih, MC, Wang, XK, Lee, SJ, Rippert, ED, Maglic, S, Kajiyama, H, Segel, D, Dutta, P, Chang, RPH, Ketterson, JB, Roberts, T, Lin, Y, Kampwirth, RT & Gray, K 1992, 'In situ x-ray diffraction studies of YBa2Cu3O x', Journal of Applied Physics, vol. 72, no. 10, pp. 4798-4804. https://doi.org/10.1063/1.352093
Williams S, Zheng JQ, Shih MC, Wang XK, Lee SJ, Rippert ED et al. In situ x-ray diffraction studies of YBa2Cu3O x. Journal of Applied Physics. 1992;72(10):4798-4804. https://doi.org/10.1063/1.352093
Williams, S. ; Zheng, J. Q. ; Shih, M. C. ; Wang, X. K. ; Lee, S. J. ; Rippert, E. D. ; Maglic, S. ; Kajiyama, Hiroshi ; Segel, D. ; Dutta, P. ; Chang, Robert P. H. ; Ketterson, J. B. ; Roberts, T. ; Lin, Y. ; Kampwirth, R. T. ; Gray, K. / In situ x-ray diffraction studies of YBa2Cu3O x. In: Journal of Applied Physics. 1992 ; Vol. 72, No. 10. pp. 4798-4804.
@article{451554236a714fdba800b46891398aea,
title = "In situ x-ray diffraction studies of YBa2Cu3O x",
abstract = "Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.",
author = "S. Williams and Zheng, {J. Q.} and Shih, {M. C.} and Wang, {X. K.} and Lee, {S. J.} and Rippert, {E. D.} and S. Maglic and Hiroshi Kajiyama and D. Segel and P. Dutta and Chang, {Robert P. H.} and Ketterson, {J. B.} and T. Roberts and Y. Lin and Kampwirth, {R. T.} and K. Gray",
year = "1992",
doi = "10.1063/1.352093",
language = "English",
volume = "72",
pages = "4798--4804",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "10",

}

TY - JOUR

T1 - In situ x-ray diffraction studies of YBa2Cu3O x

AU - Williams, S.

AU - Zheng, J. Q.

AU - Shih, M. C.

AU - Wang, X. K.

AU - Lee, S. J.

AU - Rippert, E. D.

AU - Maglic, S.

AU - Kajiyama, Hiroshi

AU - Segel, D.

AU - Dutta, P.

AU - Chang, Robert P. H.

AU - Ketterson, J. B.

AU - Roberts, T.

AU - Lin, Y.

AU - Kampwirth, R. T.

AU - Gray, K.

PY - 1992

Y1 - 1992

N2 - Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.

AB - Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.

UR - http://www.scopus.com/inward/record.url?scp=0012687520&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0012687520&partnerID=8YFLogxK

U2 - 10.1063/1.352093

DO - 10.1063/1.352093

M3 - Article

AN - SCOPUS:0012687520

VL - 72

SP - 4798

EP - 4804

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 10

ER -

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