In situ x-ray diffraction studies of YBa2Cu3O x

S. Williams; J. Q. Zheng; M. C. Shih; X. K. Wang; S. J. Lee; E. D. Rippert; S. Maglic; Hiroshi Kajiyama; D. Segel; P. Dutta; Robert P. H. Chang; J. B. Ketterson; T. Roberts; Y. Lin; R. T. Kampwirth; K. Gray

doi:10.1063/1.352093

In situ x-ray diffraction studies of YBa₂Cu₃O _x

S. Williams, J. Q. Zheng, M. C. Shih, X. K. Wang, S. J. Lee, E. D. Rippert, S. Maglic, Hiroshi Kajiyama, D. Segel, P. Dutta, Robert P. H. Chang, J. B. Ketterson, T. Roberts, Y. Lin, R. T. Kampwirth, K. Gray

Northwestern University

Research output: Contribution to journal › Article

11 Citations (Scopus)

Abstract

Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa ₂Cu₃O_x films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O₂/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO₃, LaAlO₃, and MgO.

Original language	English
Pages (from-to)	4798-4804
Number of pages	7
Journal	Journal of Applied Physics
Volume	72
Issue number	10
DOIs	https://doi.org/10.1063/1.352093
Publication status	Published - 1992

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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Williams, S., Zheng, J. Q., Shih, M. C., Wang, X. K., Lee, S. J., Rippert, E. D., Maglic, S., Kajiyama, H., Segel, D., Dutta, P., Chang, R. P. H., Ketterson, J. B., Roberts, T., Lin, Y., Kampwirth, R. T., & Gray, K. (1992). In situ x-ray diffraction studies of YBa₂Cu₃O _x. Journal of Applied Physics, 72(10), 4798-4804. https://doi.org/10.1063/1.352093

In situ x-ray diffraction studies of YBa₂Cu₃O _x. / Williams, S.; Zheng, J. Q.; Shih, M. C.; Wang, X. K.; Lee, S. J.; Rippert, E. D.; Maglic, S.; Kajiyama, Hiroshi; Segel, D.; Dutta, P.; Chang, Robert P. H.; Ketterson, J. B.; Roberts, T.; Lin, Y.; Kampwirth, R. T.; Gray, K.

In: Journal of Applied Physics, Vol. 72, No. 10, 1992, p. 4798-4804.

Research output: Contribution to journal › Article

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title = "In situ x-ray diffraction studies of YBa2Cu3O x",

abstract = "Using a specially designed off-axis faced magnetron sputtering chamber we have performed in situ x-ray diffraction studies of the growth of YBa 2Cu3Ox films using a synchrotron light source. The orientation and rocking curve width were studied as a function of substrate temperature, O2/Ar partial pressures, and deposition rate. Growth rate was studied on SrTiO3, LaAlO3, and MgO.",

author = "S. Williams and Zheng, {J. Q.} and Shih, {M. C.} and Wang, {X. K.} and Lee, {S. J.} and Rippert, {E. D.} and S. Maglic and Hiroshi Kajiyama and D. Segel and P. Dutta and Chang, {Robert P. H.} and Ketterson, {J. B.} and T. Roberts and Y. Lin and Kampwirth, {R. T.} and K. Gray",

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AU - Williams, S.

AU - Zheng, J. Q.

AU - Shih, M. C.

AU - Wang, X. K.

AU - Lee, S. J.

AU - Rippert, E. D.

AU - Maglic, S.

AU - Kajiyama, Hiroshi

AU - Segel, D.

AU - Dutta, P.

AU - Chang, Robert P. H.

AU - Ketterson, J. B.

AU - Roberts, T.

AU - Lin, Y.

AU - Kampwirth, R. T.

AU - Gray, K.

PY - 1992

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