Influence of ti interfacial layers on the electrical and microstructural properties of solgel prepared PZT films

C. J. Rawn, E. A. Kneer, Dunbar P Birnie, M. N. Orr

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Sol-gel derived lead zirconate titanate (PZT) thin films were deposited onto monolithic Pt bottom electrodes which used Ti interlayers for Pt adhesion on thermally oxidized <111 > Si. The rf-sputter deposited Pt/Ti films were annealed at 400° - 600°C for 15 minutes. Atomic Force Microscopy (AFM) was used to analyze the Pt surface features. Transmission Electron Microscopy (TEM), transmission electron diffraction, scanning transmission electron microscopy (STEM), and scanning electron microscopy (SEM) were used to investigate the microstructure of PZT films crystallized onto these electrodes. RT-66A testing was conducted to evaluate the electrode performance of the Pt/PZT/Pt structure devices. It was found that the lower temperature bottom electrode anneal created a more dense, smaller grained nucleated PZT film.

Original languageEnglish
Pages (from-to)111-119
Number of pages9
JournalIntegrated Ferroelectrics
Volume6
Issue number1-4
DOIs
Publication statusPublished - 1995

Fingerprint

electrical properties
Electrodes
electrodes
Transmission electron microscopy
transmission electron microscopy
Scanning electron microscopy
scanning electron microscopy
Electron diffraction
Sol-gels
interlayers
Atomic force microscopy
adhesion
Adhesion
electron diffraction
atomic force microscopy
gels
Thin films
microstructure
Microstructure
Testing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Ceramics and Composites
  • Materials Chemistry
  • Electronic, Optical and Magnetic Materials

Cite this

Influence of ti interfacial layers on the electrical and microstructural properties of solgel prepared PZT films. / Rawn, C. J.; Kneer, E. A.; Birnie, Dunbar P; Orr, M. N.

In: Integrated Ferroelectrics, Vol. 6, No. 1-4, 1995, p. 111-119.

Research output: Contribution to journalArticle

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