Abstract
Hillock formation on Pt bottom electrode surfaces has been investigated for <111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.
| Original language | English |
|---|---|
| Pages (from-to) | 61-73 |
| Number of pages | 13 |
| Journal | Integrated Ferroelectrics |
| Volume | 7 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - 1995 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Ceramics and Composites
- Materials Chemistry
- Electronic, Optical and Magnetic Materials
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Kneer, E. A., Birnie, D. P., Schrimpf, R. D., Podlesny, J. C., & Teowee, G. (1995). Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication. Integrated Ferroelectrics, 7(1-4), 61-73. https://doi.org/10.1080/10584589508220221