Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication

Emil A. Kneer; Dunbar P. Birnie; R. D. Schrimpf; J. C. Podlesny; G. Teowee

doi:10.1080/10584589508220221

Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication

Emil A. Kneer, Dunbar P. Birnie, R. D. Schrimpf, J. C. Podlesny, G. Teowee

Rutgers University

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Hillock formation on Pt bottom electrode surfaces has been investigated for < 111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

Original language	English
Pages (from-to)	61-73
Number of pages	13
Journal	Integrated Ferroelectrics
Volume	7
Issue number	1-4
DOIs	https://doi.org/10.1080/10584589508220221
Publication status	Published - Feb 1995

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Control and Systems Engineering
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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title = "Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication",

abstract = "Hillock formation on Pt bottom electrode surfaces has been investigated for < 111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.",

author = "Kneer, {Emil A.} and Birnie, {Dunbar P.} and Schrimpf, {R. D.} and Podlesny, {J. C.} and G. Teowee",

note = "Funding Information: This work was supported by the United States Navy, contract # N00014-90-C-2130. We are grateful for the ability to use sol-gel solutions which were developed by G. Teowee, J. M. Boulton, and D. R. Uhlmann under the support of the Air Force Office of Scientific Research.",

year = "1995",

month = feb,

doi = "10.1080/10584589508220221",

language = "English",

volume = "7",

pages = "61--73",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

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T1 - Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication

AU - Kneer, Emil A.

AU - Birnie, Dunbar P.

AU - Schrimpf, R. D.

AU - Podlesny, J. C.

AU - Teowee, G.

N1 - Funding Information: This work was supported by the United States Navy, contract # N00014-90-C-2130. We are grateful for the ability to use sol-gel solutions which were developed by G. Teowee, J. M. Boulton, and D. R. Uhlmann under the support of the Air Force Office of Scientific Research.

PY - 1995/2

Y1 - 1995/2

N2 - Hillock formation on Pt bottom electrode surfaces has been investigated for < 111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

AB - Hillock formation on Pt bottom electrode surfaces has been investigated for < 111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

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