Abstract
Hillock formation on Pt bottom electrode surfaces has been investigated for < 111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.
Original language | English |
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Pages (from-to) | 61-73 |
Number of pages | 13 |
Journal | Integrated Ferroelectrics |
Volume | 7 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - Feb 1995 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Control and Systems Engineering
- Ceramics and Composites
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry