Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication

Emil A. Kneer; Dunbar P Birnie; R. D. Schrimpf; J. C. Podlesny; G. Teowee

doi:10.1080/10584589508220221

Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication

Emil A. Kneer, Dunbar P Birnie, R. D. Schrimpf, J. C. Podlesny, G. Teowee

Rutgers University

Research output: Contribution to journal › Article

8 Citations (Scopus)

Abstract

Hillock formation on Pt bottom electrode surfaces has been investigated for <111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.

Original language	English
Pages (from-to)	61-73
Number of pages	13
Journal	Integrated Ferroelectrics
Volume	7
Issue number	1-4
DOIs	https://doi.org/10.1080/10584589508220221
Publication status	Published - 1995

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ASJC Scopus subject areas

Control and Systems Engineering
Condensed Matter Physics
Electrical and Electronic Engineering
Ceramics and Composites
Materials Chemistry
Electronic, Optical and Magnetic Materials

Cite this

Kneer, E. A., Birnie, D. P., Schrimpf, R. D., Podlesny, J. C., & Teowee, G. (1995). Investigation of surface roughness and hillock formation on platinized substrates used for pt/pzt/pt capacitor fabrication. Integrated Ferroelectrics, 7(1-4), 61-73. https://doi.org/10.1080/10584589508220221

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abstract = "Hillock formation on Pt bottom electrode surfaces has been investigated for <111 > Si and sapphire substrates. This paper correlates the electrical performance of Pt/PZT/Pt structured capacitors with the observed surface roughness and/or hillock presence on the Pt bottom electrode.",

author = "Kneer, {Emil A.} and Birnie, {Dunbar P} and Schrimpf, {R. D.} and Podlesny, {J. C.} and G. Teowee",

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AU - Podlesny, J. C.

AU - Teowee, G.

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Access to Document

10.1080/10584589508220221