Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays

R. Lopez, J. Y. Suh, Leonard C Feldman, R. F. Haglund

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Long-range ordered arrays of vanadium dioxide nanoparticles are fabricated by pulsed laser deposition in a patterned layer of poly(methyl methacrylate) resist. The two-dimensional arbitrary pattern is created by focused ion beam exposure of the resist, followed by pulsed laser deposition and thermal annealing. Interaction of light with the nanoparticles is controlled by their geometrical arrangement as well as by the difference in optical properties displayed between the metallic and semiconducting phases of VO 2. Arrays like this open opportunities to study optical resonances and interactions for nanoparticles in close proximity, in the framework of the metal-semiconductor phase transition in VO 2.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsJ. Liu, D. McIlroy, L. Merhari, J.P. Pendry, J.T. Borenstein, P. Grodzinski, L.P. Lee, Z.L. Wang
Pages319-324
Number of pages6
Volume820
Publication statusPublished - 2004
EventNanoengineered Assemblies and Advanced Micro/Nanosystems - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

Other

OtherNanoengineered Assemblies and Advanced Micro/Nanosystems
CountryUnited States
CitySan Francisco, CA
Period4/13/044/16/04

Fingerprint

Ion beams
Pulsed laser deposition
Nanoparticles
Fabrication
Focused ion beams
Polymethyl Methacrylate
Polymethyl methacrylates
Vanadium
Optical properties
Phase transitions
Metals
Annealing
Semiconductor materials
Hot Temperature
vanadium dioxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Lopez, R., Suh, J. Y., Feldman, L. C., & Haglund, R. F. (2004). Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays. In J. Liu, D. McIlroy, L. Merhari, J. P. Pendry, J. T. Borenstein, P. Grodzinski, L. P. Lee, ... Z. L. Wang (Eds.), Materials Research Society Symposium Proceedings (Vol. 820, pp. 319-324). [R1.5]

Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays. / Lopez, R.; Suh, J. Y.; Feldman, Leonard C; Haglund, R. F.

Materials Research Society Symposium Proceedings. ed. / J. Liu; D. McIlroy; L. Merhari; J.P. Pendry; J.T. Borenstein; P. Grodzinski; L.P. Lee; Z.L. Wang. Vol. 820 2004. p. 319-324 R1.5.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Lopez, R, Suh, JY, Feldman, LC & Haglund, RF 2004, Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays. in J Liu, D McIlroy, L Merhari, JP Pendry, JT Borenstein, P Grodzinski, LP Lee & ZL Wang (eds), Materials Research Society Symposium Proceedings. vol. 820, R1.5, pp. 319-324, Nanoengineered Assemblies and Advanced Micro/Nanosystems, San Francisco, CA, United States, 4/13/04.
Lopez R, Suh JY, Feldman LC, Haglund RF. Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays. In Liu J, McIlroy D, Merhari L, Pendry JP, Borenstein JT, Grodzinski P, Lee LP, Wang ZL, editors, Materials Research Society Symposium Proceedings. Vol. 820. 2004. p. 319-324. R1.5
Lopez, R. ; Suh, J. Y. ; Feldman, Leonard C ; Haglund, R. F. / Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays. Materials Research Society Symposium Proceedings. editor / J. Liu ; D. McIlroy ; L. Merhari ; J.P. Pendry ; J.T. Borenstein ; P. Grodzinski ; L.P. Lee ; Z.L. Wang. Vol. 820 2004. pp. 319-324
@inproceedings{742260f7018f4628abb7e5ae7d63dd20,
title = "Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays",
abstract = "Long-range ordered arrays of vanadium dioxide nanoparticles are fabricated by pulsed laser deposition in a patterned layer of poly(methyl methacrylate) resist. The two-dimensional arbitrary pattern is created by focused ion beam exposure of the resist, followed by pulsed laser deposition and thermal annealing. Interaction of light with the nanoparticles is controlled by their geometrical arrangement as well as by the difference in optical properties displayed between the metallic and semiconducting phases of VO 2. Arrays like this open opportunities to study optical resonances and interactions for nanoparticles in close proximity, in the framework of the metal-semiconductor phase transition in VO 2.",
author = "R. Lopez and Suh, {J. Y.} and Feldman, {Leonard C} and Haglund, {R. F.}",
year = "2004",
language = "English",
volume = "820",
pages = "319--324",
editor = "J. Liu and D. McIlroy and L. Merhari and J.P. Pendry and J.T. Borenstein and P. Grodzinski and L.P. Lee and Z.L. Wang",
booktitle = "Materials Research Society Symposium Proceedings",

}

TY - GEN

T1 - Ion beam lithographic fabrication of ordered VO 2 nanoparticle arrays

AU - Lopez, R.

AU - Suh, J. Y.

AU - Feldman, Leonard C

AU - Haglund, R. F.

PY - 2004

Y1 - 2004

N2 - Long-range ordered arrays of vanadium dioxide nanoparticles are fabricated by pulsed laser deposition in a patterned layer of poly(methyl methacrylate) resist. The two-dimensional arbitrary pattern is created by focused ion beam exposure of the resist, followed by pulsed laser deposition and thermal annealing. Interaction of light with the nanoparticles is controlled by their geometrical arrangement as well as by the difference in optical properties displayed between the metallic and semiconducting phases of VO 2. Arrays like this open opportunities to study optical resonances and interactions for nanoparticles in close proximity, in the framework of the metal-semiconductor phase transition in VO 2.

AB - Long-range ordered arrays of vanadium dioxide nanoparticles are fabricated by pulsed laser deposition in a patterned layer of poly(methyl methacrylate) resist. The two-dimensional arbitrary pattern is created by focused ion beam exposure of the resist, followed by pulsed laser deposition and thermal annealing. Interaction of light with the nanoparticles is controlled by their geometrical arrangement as well as by the difference in optical properties displayed between the metallic and semiconducting phases of VO 2. Arrays like this open opportunities to study optical resonances and interactions for nanoparticles in close proximity, in the framework of the metal-semiconductor phase transition in VO 2.

UR - http://www.scopus.com/inward/record.url?scp=14944381540&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=14944381540&partnerID=8YFLogxK

M3 - Conference contribution

VL - 820

SP - 319

EP - 324

BT - Materials Research Society Symposium Proceedings

A2 - Liu, J.

A2 - McIlroy, D.

A2 - Merhari, L.

A2 - Pendry, J.P.

A2 - Borenstein, J.T.

A2 - Grodzinski, P.

A2 - Lee, L.P.

A2 - Wang, Z.L.

ER -