Ion beam lithographic fabrication of ordered VO2 nanoparticle arrays

R. Lopez, J. Y. Suh, L. C. Feldman, R. F. Haglund

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


Long-range ordered arrays of vanadium dioxide nanoparticles are fabricated by pulsed laser deposition in a patterned layer of poly(methyl methacrylate) resist. The two-dimensional arbitrary pattern is created by focused ion beam exposure of the resist, followed by pulsed laser deposition and thermal annealing. Interaction of light with the nanoparticles is controlled by their geometrical arrangement as well as by the difference in optical properties displayed between the metallic and semiconducting phases of VO2. Arrays like this open opportunities to study optical resonances and interactions for nanoparticles in close proximity, in the framework of the metal-semiconductor phase transition in VO2.

Original languageEnglish
Article numberR1.5
Pages (from-to)319-324
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Publication statusPublished - 2004
EventNanoengineered Assemblies and Advanced Micro/Nanosystems - San Francisco, CA, United States
Duration: Apr 13 2004Apr 16 2004

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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