Ion beam measurements of Sn/In ratios in indium tin oxide films prepared by pulsed-laser deposition

X. T. Ren; M. B. Huang; S. Amadon; W. A. Lanford; M. A. Morales Paliza; L. C. Feldman

doi:10.1016/S0168-583X(00)00437-7

Ion beam measurements of Sn/In ratios in indium tin oxide films prepared by pulsed-laser deposition

X. T. Ren, M. B. Huang, S. Amadon, W. A. Lanford, M. A. Morales Paliza, L. C. Feldman

Rutgers University

Research output: Contribution to journal › Article

3 Citations (Scopus)

Abstract

Ion beam techniques have been applied to determine the tin-to-indium ratio in indium tin oxide (ITO) films prepared by pulsed-laser deposition (PLD). Particle induced X-ray emission (PIXE) and high-resolution Rutherford backscattering (HRRBS) using a magnetic spectrometer were carried out on various ITO samples. Both techniques agreed within experimental errors. This work suggests that PIXE and HRRBS are applicable for analysis of high-Z elements in thin films, providing valuable information for material synthesis.

Original language	English
Pages (from-to)	187-193
Number of pages	7
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	174
Issue number	1-2
DOIs	https://doi.org/10.1016/S0168-583X(00)00437-7
Publication status	Published - Mar 2001

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ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Cite this

Ren, X. T., Huang, M. B., Amadon, S., Lanford, W. A., Morales Paliza, M. A., & Feldman, L. C. (2001). Ion beam measurements of Sn/In ratios in indium tin oxide films prepared by pulsed-laser deposition. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 174(1-2), 187-193. https://doi.org/10.1016/S0168-583X(00)00437-7

Ion beam measurements of Sn/In ratios in indium tin oxide films prepared by pulsed-laser deposition. / Ren, X. T.; Huang, M. B.; Amadon, S.; Lanford, W. A.; Morales Paliza, M. A.; Feldman, L. C.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 174, No. 1-2, 03.2001, p. 187-193.

Research output: Contribution to journal › Article

Ren, XT, Huang, MB, Amadon, S, Lanford, WA, Morales Paliza, MA & Feldman, LC 2001, 'Ion beam measurements of Sn/In ratios in indium tin oxide films prepared by pulsed-laser deposition', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 174, no. 1-2, pp. 187-193. https://doi.org/10.1016/S0168-583X(00)00437-7

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10.1016/S0168-583X(00)00437-7