Ion energy and charge state distributions in zirconium nitride arc plasma

Manish Chhowalla

doi:10.1063/1.1606107

Ion energy and charge state distributions in zirconium nitride arc plasma

Manish Chhowalla

Rutgers University

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr²⁺ and Zr⁴⁺, respectively. It was found that the peak ion energies of all Zrⁿ⁺ species in vacuum were slightly higher than in nitrogen.

Original language	English
Pages (from-to)	1542-1544
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	8
DOIs	https://doi.org/10.1063/1.1606107
Publication status	Published - Aug 25 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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abstract = "A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.",

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Ion energy and charge state distributions in zirconium nitride arc plasma

Abstract

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