Abstract
A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.
Original language | English |
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Pages (from-to) | 1542-1544 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 8 |
DOIs | |
Publication status | Published - Aug 25 2003 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)