Ion energy and charge state distributions in zirconium nitride arc plasma

Manish Chhowalla

doi:10.1063/1.1606107

Ion energy and charge state distributions in zirconium nitride arc plasma

Manish Chhowalla

Rutgers University

Research output: Contribution to journal › Article

13 Citations (Scopus)

Abstract

A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr²⁺ and Zr⁴⁺, respectively. It was found that the peak ion energies of all Zrⁿ⁺ species in vacuum were slightly higher than in nitrogen.

Original language	English
Pages (from-to)	1542-1544
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	8
DOIs	https://doi.org/10.1063/1.1606107
Publication status	Published - Aug 25 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1606107

Fingerprint Dive into the research topics of 'Ion energy and charge state distributions in zirconium nitride arc plasma'. Together they form a unique fingerprint.

Cite this

Chhowalla, M. (2003). Ion energy and charge state distributions in zirconium nitride arc plasma. Applied Physics Letters, 83(8), 1542-1544. https://doi.org/10.1063/1.1606107

@article{0b22c5fa7ca54325b0cc7f9182406a04,

title = "Ion energy and charge state distributions in zirconium nitride arc plasma",

abstract = "A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.",

author = "Manish Chhowalla",

year = "2003",

month = aug,

day = "25",

doi = "10.1063/1.1606107",

language = "English",

volume = "83",

pages = "1542--1544",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "8",

}

TY - JOUR

T1 - Ion energy and charge state distributions in zirconium nitride arc plasma

AU - Chhowalla, Manish

PY - 2003/8/25

Y1 - 2003/8/25

N2 - A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.

AB - A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.

UR - http://www.scopus.com/inward/record.url?scp=0042281656&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042281656&partnerID=8YFLogxK

U2 - 10.1063/1.1606107

DO - 10.1063/1.1606107

M3 - Article

AN - SCOPUS:0042281656

VL - 83

SP - 1542

EP - 1544

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 8

ER -