Ion energy and charge state distributions in zirconium nitride arc plasma

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13 Citations (Scopus)

Abstract

A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.

Original languageEnglish
Pages (from-to)1542-1544
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number8
DOIs
Publication statusPublished - Aug 25 2003

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zirconium nitrides
plasma jets
nitrogen
vacuum
energy distribution
ions
energy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Ion energy and charge state distributions in zirconium nitride arc plasma. / Chhowalla, Manish.

In: Applied Physics Letters, Vol. 83, No. 8, 25.08.2003, p. 1542-1544.

Research output: Contribution to journalArticle

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