Ion energy and charge state distributions in zirconium nitride arc plasma

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A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.

Original languageEnglish
Pages (from-to)1542-1544
Number of pages3
JournalApplied Physics Letters
Issue number8
Publication statusPublished - Aug 25 2003


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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