Abstract
A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.
| Original language | English |
|---|---|
| Pages (from-to) | 1542-1544 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 83 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - Aug 25 2003 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
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Ion energy and charge state distributions in zirconium nitride arc plasma. / Chhowalla, Manish.
In: Applied Physics Letters, Vol. 83, No. 8, 25.08.2003, p. 1542-1544.Research output: Contribution to journal › Article
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TY - JOUR
T1 - Ion energy and charge state distributions in zirconium nitride arc plasma
AU - Chhowalla, Manish
PY - 2003/8/25
Y1 - 2003/8/25
N2 - A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.
AB - A study was performed on charge states and ion energy distributions (IED) in zirconium nitride arc plasma. The dominant charge states in nitrogen and in vacuum were Zr2+ and Zr4+, respectively. It was found that the peak ion energies of all Zrn+ species in vacuum were slightly higher than in nitrogen.
UR - http://www.scopus.com/inward/record.url?scp=0042281656&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0042281656&partnerID=8YFLogxK
U2 - 10.1063/1.1606107
DO - 10.1063/1.1606107
M3 - Article
AN - SCOPUS:0042281656
VL - 83
SP - 1542
EP - 1544
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 8
ER -