Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc

M. M M Bilek, Manish Chhowalla, M. Weiler, W. I. Milne

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Abstract

The plasma generated by a silicon filtered cathodic vacuum arc has been investigated using a Faraday cup and Langmuir probes. Ion energy distributions for arc currents ranging from 30 to 80 A were measured. Mean ion energies were found to range from 8 to 18 eV. The ion saturation current density varied from 0.1 to 1 mA/cm2 depending on both the arc and filter coil currents. The energy distributions were fitted by a sum of Gaussians spaced according to the gas dynamic model for ion acceleration at the cathode spot.

Original languageEnglish
Pages (from-to)1287-1291
Number of pages5
JournalJournal of Applied Physics
Volume79
Issue number3
Publication statusPublished - Feb 1 1996

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ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

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