Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc

M. M M Bilek, Manish Chhowalla, M. Weiler, W. I. Milne

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

The plasma generated by a silicon filtered cathodic vacuum arc has been investigated using a Faraday cup and Langmuir probes. Ion energy distributions for arc currents ranging from 30 to 80 A were measured. Mean ion energies were found to range from 8 to 18 eV. The ion saturation current density varied from 0.1 to 1 mA/cm2 depending on both the arc and filter coil currents. The energy distributions were fitted by a sum of Gaussians spaced according to the gas dynamic model for ion acceleration at the cathode spot.

Original languageEnglish
Pages (from-to)1287-1291
Number of pages5
JournalJournal of Applied Physics
Volume79
Issue number3
Publication statusPublished - Feb 1 1996

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arcs
vacuum
silicon
energy distribution
ions
energy
gas dynamics
electrostatic probes
dynamic models
coils
cathodes
current density
saturation
filters
probes

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

Cite this

Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc. / Bilek, M. M M; Chhowalla, Manish; Weiler, M.; Milne, W. I.

In: Journal of Applied Physics, Vol. 79, No. 3, 01.02.1996, p. 1287-1291.

Research output: Contribution to journalArticle

Bilek, M. M M ; Chhowalla, Manish ; Weiler, M. ; Milne, W. I. / Ion energy and plasma characterization in a silicon filtered cathodic vacuum arc. In: Journal of Applied Physics. 1996 ; Vol. 79, No. 3. pp. 1287-1291.
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