Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing

J. M. Chabala; Robert P. H. Chang; J. B. Ketterson; R. Levi-Setti; D. X. Li; Y. L. Wang; X. K. Wang

doi:10.1016/0921-4534(89)90924-6

Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing

J. M. Chabala, Robert P. H. Chang, J. B. Ketterson, R. Levi-Setti, D. X. Li, Y. L. Wang, X. K. Wang

Northwestern University

Research output: Contribution to journal › Article

1 Citation (Scopus)

Abstract

The chemical and structural properties of epitaxial Y₁Ba₂Cu₃(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

Original language	English
Pages (from-to)	75-76
Number of pages	2
Journal	Physica C: Superconductivity and its Applications
Volume	162-164
Issue number	PART 1
DOIs	https://doi.org/10.1016/0921-4534(89)90924-6
Publication status	Published - 1989

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ASJC Scopus subject areas

Condensed Matter Physics

Cite this

Chabala, J. M., Chang, R. P. H., Ketterson, J. B., Levi-Setti, R., Li, D. X., Wang, Y. L., & Wang, X. K. (1989). Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing. Physica C: Superconductivity and its Applications, 162-164(PART 1), 75-76. https://doi.org/10.1016/0921-4534(89)90924-6

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abstract = "The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.",

author = "Chabala, {J. M.} and Chang, {Robert P. H.} and Ketterson, {J. B.} and R. Levi-Setti and Li, {D. X.} and Wang, {Y. L.} and Wang, {X. K.}",

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AU - Chang, Robert P. H.

AU - Ketterson, J. B.

AU - Levi-Setti, R.

AU - Li, D. X.

AU - Wang, Y. L.

AU - Wang, X. K.

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AB - The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

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10.1016/0921-4534(89)90924-6