TY - JOUR
T1 - Ion microprobe characterization of e-beam deposited YBaCu(F)O films
T2 - Effects of post-deposition processing
AU - Chabala, J. M.
AU - Chang, Robert P. H.
AU - Ketterson, J. B.
AU - Levi-Setti, R.
AU - Li, D. X.
AU - Wang, Y. L.
AU - Wang, X. K.
PY - 1989
Y1 - 1989
N2 - The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.
AB - The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.
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U2 - 10.1016/0921-4534(89)90924-6
DO - 10.1016/0921-4534(89)90924-6
M3 - Article
AN - SCOPUS:0024875669
VL - 162-164
SP - 75
EP - 76
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - PART 1
ER -