Ion microprobe characterization of e-beam deposited YBaCu(F)O films: Effects of post-deposition processing

J. M. Chabala, Robert P. H. Chang, J. B. Ketterson, R. Levi-Setti, D. X. Li, Y. L. Wang, X. K. Wang

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Abstract

The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

Original languageEnglish
Pages (from-to)75-76
Number of pages2
JournalPhysica C: Superconductivity and its Applications
Volume162-164
Issue numberPART 1
DOIs
Publication statusPublished - 1989

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ASJC Scopus subject areas

  • Condensed Matter Physics

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