Ion microprobe characterization of e-beam deposited YBaCu(F)O films

Effects of post-deposition processing

J. M. Chabala, Robert P. H. Chang, J. B. Ketterson, R. Levi-Setti, D. X. Li, Y. L. Wang, X. K. Wang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The chemical and structural properties of epitaxial Y1Ba2Cu3(F)O thin films, fabricated by multilayer electron beam evaporation, are evaluated, both laterally and vertically, as a function of various annealing schedules by secondary ion mass spectrometry (SIMS) using a high resolution scanning ion microprobe. The presence of residual F is related to the superconducting transition temperature of these materials.

Original languageEnglish
Pages (from-to)75-76
Number of pages2
JournalPhysica C: Superconductivity and its Applications
Volume162-164
Issue numberPART 1
DOIs
Publication statusPublished - 1989

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schedules
Secondary ion mass spectrometry
chemical properties
Chemical properties
secondary ion mass spectrometry
Superconducting transition temperature
Structural properties
Electron beams
Multilayers
Evaporation
transition temperature
evaporation
electron beams
Annealing
Ions
Scanning
Thin films
annealing
scanning
high resolution

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Ion microprobe characterization of e-beam deposited YBaCu(F)O films : Effects of post-deposition processing. / Chabala, J. M.; Chang, Robert P. H.; Ketterson, J. B.; Levi-Setti, R.; Li, D. X.; Wang, Y. L.; Wang, X. K.

In: Physica C: Superconductivity and its Applications, Vol. 162-164, No. PART 1, 1989, p. 75-76.

Research output: Contribution to journalArticle

Chabala, J. M. ; Chang, Robert P. H. ; Ketterson, J. B. ; Levi-Setti, R. ; Li, D. X. ; Wang, Y. L. ; Wang, X. K. / Ion microprobe characterization of e-beam deposited YBaCu(F)O films : Effects of post-deposition processing. In: Physica C: Superconductivity and its Applications. 1989 ; Vol. 162-164, No. PART 1. pp. 75-76.
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