Large-area nanoscale patterning: Chemistry meets fabrication

Joel Henzie; Jeremy E. Barton; Christopher L. Stender; Teri W. Odom

doi:10.1021/ar050013n

Large-area nanoscale patterning: Chemistry meets fabrication

Joel Henzie, Jeremy E. Barton, Christopher L. Stender, Teri W. Odom

Northwestern University

Research output: Contribution to journal › Article

188 Citations (Scopus)

Abstract

This Account describes a new paradigm for large-area nanoscale patterning that combines bottom-up and top-down approaches, merging chemistry with fabrication. This hybrid strategy uses simple nanofabrication techniques to control the alignment, size, shape, and periodicity of nanopatterns and chemical methods to control their materials properties and crystallinity. These tools are highly flexible and can create surface-patterned nanostructures with unusual properties and free-standing nanostructures that are multifunctional and monodisperse. The unprecedented scientific and technological opportunities enabled by nanoscale patterning over wafer-sized areas are discussed.

Original language	English
Pages (from-to)	249-257
Number of pages	9
Journal	Accounts of chemical research
Volume	39
Issue number	4
DOIs	https://doi.org/10.1021/ar050013n
Publication status	Published - Apr 1 2006

ASJC Scopus subject areas

Chemistry(all)

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10.1021/ar050013n

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Henzie, J., Barton, J. E., Stender, C. L., & Odom, T. W. (2006). Large-area nanoscale patterning: Chemistry meets fabrication. Accounts of chemical research, 39(4), 249-257. https://doi.org/10.1021/ar050013n

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