TY - JOUR
T1 - Large-area nanoscale patterning
T2 - Chemistry meets fabrication
AU - Henzie, Joel
AU - Barton, Jeremy E.
AU - Stender, Christopher L.
AU - Odom, Teri W.
PY - 2006/4/1
Y1 - 2006/4/1
N2 - This Account describes a new paradigm for large-area nanoscale patterning that combines bottom-up and top-down approaches, merging chemistry with fabrication. This hybrid strategy uses simple nanofabrication techniques to control the alignment, size, shape, and periodicity of nanopatterns and chemical methods to control their materials properties and crystallinity. These tools are highly flexible and can create surface-patterned nanostructures with unusual properties and free-standing nanostructures that are multifunctional and monodisperse. The unprecedented scientific and technological opportunities enabled by nanoscale patterning over wafer-sized areas are discussed.
AB - This Account describes a new paradigm for large-area nanoscale patterning that combines bottom-up and top-down approaches, merging chemistry with fabrication. This hybrid strategy uses simple nanofabrication techniques to control the alignment, size, shape, and periodicity of nanopatterns and chemical methods to control their materials properties and crystallinity. These tools are highly flexible and can create surface-patterned nanostructures with unusual properties and free-standing nanostructures that are multifunctional and monodisperse. The unprecedented scientific and technological opportunities enabled by nanoscale patterning over wafer-sized areas are discussed.
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U2 - 10.1021/ar050013n
DO - 10.1021/ar050013n
M3 - Article
C2 - 16618092
AN - SCOPUS:33646492217
VL - 39
SP - 249
EP - 257
JO - Accounts of Chemical Research
JF - Accounts of Chemical Research
SN - 0001-4842
IS - 4
ER -