Abstract
Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | John D. Mackenzie, Donald R. Ulrich |
| Publisher | Publ by Int Soc for Optical Engineering |
| Pages | 319-328 |
| Number of pages | 10 |
| Volume | 1328 |
| Publication status | Published - 1990 |
| Event | Sol-Gel Optics - San Diego, CA, USA, CA, USA Duration: Jul 11 1990 → Jul 13 1990 |
Other
| Other | Sol-Gel Optics |
|---|---|
| City | San Diego, CA, USA, CA, USA |
| Period | 7/11/90 → 7/13/90 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Laser processing of channel waveguide structures in sol-gel coatings. / Fabes, B. D.; Taylor, D. J.; Weisenbach, L.; Stuppi, M. M.; Klein, D. L.; Raymond, L. J.; Zelinski, B. J J; Birnie, Dunbar P.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / John D. Mackenzie; Donald R. Ulrich. Vol. 1328 Publ by Int Soc for Optical Engineering, 1990. p. 319-328.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Laser processing of channel waveguide structures in sol-gel coatings
AU - Fabes, B. D.
AU - Taylor, D. J.
AU - Weisenbach, L.
AU - Stuppi, M. M.
AU - Klein, D. L.
AU - Raymond, L. J.
AU - Zelinski, B. J J
AU - Birnie, Dunbar P
PY - 1990
Y1 - 1990
N2 - Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.
AB - Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.
UR - http://www.scopus.com/inward/record.url?scp=0025532541&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0025532541&partnerID=8YFLogxK
M3 - Conference contribution
VL - 1328
SP - 319
EP - 328
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Mackenzie, John D.
A2 - Ulrich, Donald R.
PB - Publ by Int Soc for Optical Engineering
ER -