Laser processing of channel waveguide structures in sol-gel coatings

B. D. Fabes; D. J. Taylor; L. Weisenbach; M. M. Stuppi; D. L. Klein; L. J. Raymond; B. J.J. Zelinski; D. P. Birnie

doi:10.1117/12.22570

Laser processing of channel waveguide structures in sol-gel coatings

B. D. Fabes, D. J. Taylor, L. Weisenbach, M. M. Stuppi, D. L. Klein, L. J. Raymond, B. J.J. Zelinski, D. P. Birnie

Rutgers University

Research output: Contribution to journal › Conference article › peer-review

21 Citations (Scopus)

Abstract

Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.

Original language	English
Pages (from-to)	319-328
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1328
DOIs	https://doi.org/10.1117/12.22570
Publication status	Published - 1990
Event	Sol-Gel Optics - San Diego, CA, USA, CA, USA Duration: Jul 11 1990 → Jul 13 1990

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Laser processing of channel waveguide structures in sol-gel coatings. / Fabes, B. D.; Taylor, D. J.; Weisenbach, L.; Stuppi, M. M.; Klein, D. L.; Raymond, L. J.; Zelinski, B. J.J.; Birnie, D. P.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1328, 1990, p. 319-328.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.",

author = "Fabes, {B. D.} and Taylor, {D. J.} and L. Weisenbach and Stuppi, {M. M.} and Klein, {D. L.} and Raymond, {L. J.} and Zelinski, {B. J.J.} and Birnie, {D. P.}",

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AU - Fabes, B. D.

AU - Taylor, D. J.

AU - Weisenbach, L.

AU - Stuppi, M. M.

AU - Klein, D. L.

AU - Raymond, L. J.

AU - Zelinski, B. J.J.

AU - Birnie, D. P.

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N2 - Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.

AB - Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.

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