Laser processing of channel waveguide structures in sol-gel coatings

B. D. Fabes; D. J. Taylor; L. Weisenbach; M. M. Stuppi; D. L. Klein; L. J. Raymond; B. J J Zelinski; Dunbar P Birnie

Laser processing of channel waveguide structures in sol-gel coatings

B. D. Fabes, D. J. Taylor, L. Weisenbach, M. M. Stuppi, D. L. Klein, L. J. Raymond, B. J J Zelinski, Dunbar P Birnie

Rutgers University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

21 Citations (Scopus)

Abstract

Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	John D. Mackenzie, Donald R. Ulrich
Publisher	Publ by Int Soc for Optical Engineering
Pages	319-328
Number of pages	10
Volume	1328
Publication status	Published - 1990
Event	Sol-Gel Optics - San Diego, CA, USA, CA, USA Duration: Jul 11 1990 → Jul 13 1990

Other

Other	Sol-Gel Optics
City	San Diego, CA, USA, CA, USA
Period	7/11/90 → 7/13/90

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

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Fabes, B. D., Taylor, D. J., Weisenbach, L., Stuppi, M. M., Klein, D. L., Raymond, L. J., Zelinski, B. J. J., & Birnie, D. P. (1990). Laser processing of channel waveguide structures in sol-gel coatings. In J. D. Mackenzie, & D. R. Ulrich (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 1328, pp. 319-328). Publ by Int Soc for Optical Engineering.

Laser processing of channel waveguide structures in sol-gel coatings. / Fabes, B. D.; Taylor, D. J.; Weisenbach, L.; Stuppi, M. M.; Klein, D. L.; Raymond, L. J.; Zelinski, B. J J; Birnie, Dunbar P.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / John D. Mackenzie; Donald R. Ulrich. Vol. 1328 Publ by Int Soc for Optical Engineering, 1990. p. 319-328.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fabes, BD, Taylor, DJ, Weisenbach, L, Stuppi, MM, Klein, DL, Raymond, LJ, Zelinski, BJJ & Birnie, DP 1990, Laser processing of channel waveguide structures in sol-gel coatings. in JD Mackenzie & DR Ulrich (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 1328, Publ by Int Soc for Optical Engineering, pp. 319-328, Sol-Gel Optics, San Diego, CA, USA, CA, USA, 7/11/90.

Fabes, B. D. ; Taylor, D. J. ; Weisenbach, L. ; Stuppi, M. M. ; Klein, D. L. ; Raymond, L. J. ; Zelinski, B. J J ; Birnie, Dunbar P. / Laser processing of channel waveguide structures in sol-gel coatings. Proceedings of SPIE - The International Society for Optical Engineering. editor / John D. Mackenzie ; Donald R. Ulrich. Vol. 1328 Publ by Int Soc for Optical Engineering, 1990. pp. 319-328

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abstract = "Sol-gel derived silica, silica-titania, and tantala coatings were covered with a thin metal film and translated across a Nd:YAG laser beam (1.06 μm). The laser energy was absorbed by the metal film, which heated the underlying sol-gel coating. This heating densified the sol-gel coatings, thereby increasing the index of refraction of the laser heated region, and forming channel waveguide structures in all three systems. The channels formed by this technique were etched, to remove the undensified regions, which resulted in ridged waveguide structures. The structures were also produced by depositing a metal pattern using photolithographic techniques, and rastering the laser across the entire sample. The refractive indicies of laser densified and furnace densified silica coatings were similar. Large differences were observed in the indicies of laser and furnace densified coatings for the silica-titania and tantala systems.",

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