Lateral field emitters fabricated using carbon nanotubes

A. S. Teh, S. B. Lee, K. B K Teo, Manish Chhowalla, W. I. Milne, D. G. Hasko, H. Ahmed, G. A J Amaratunga

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

We report on the fabrication of lateral emitters using carbon nanotubes (CNTs) grown via plasma enhanced chemical vapour deposition (PECVD). Carbon nanotubes are dispersed randomly onto a substrate, mapped, contacted with metal, and by etching the substrate, a suspended lateral emitter structure is formed. Field emission measurements from the lateral emitters show a turn-on voltage as low as 12 V. The emission characteristics showed good fits to the Fowler-Nordheim (FN) theory indicating that conventional field emission was indeed observed from these devices.

Original languageEnglish
Pages (from-to)789-796
Number of pages8
JournalMicroelectronic Engineering
Volume67-68
DOIs
Publication statusPublished - Jun 2003

Fingerprint

Carbon Nanotubes
Field emission
Carbon nanotubes
emitters
carbon nanotubes
field emission
Substrates
Plasma enhanced chemical vapor deposition
Etching
Metals
Fabrication
Electric potential
etching
vapor deposition
fabrication
electric potential
metals

Keywords

  • Carbon nanotube
  • Field emission
  • Lateral

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics

Cite this

Teh, A. S., Lee, S. B., Teo, K. B. K., Chhowalla, M., Milne, W. I., Hasko, D. G., ... Amaratunga, G. A. J. (2003). Lateral field emitters fabricated using carbon nanotubes. Microelectronic Engineering, 67-68, 789-796. https://doi.org/10.1016/S0167-9317(03)00140-0

Lateral field emitters fabricated using carbon nanotubes. / Teh, A. S.; Lee, S. B.; Teo, K. B K; Chhowalla, Manish; Milne, W. I.; Hasko, D. G.; Ahmed, H.; Amaratunga, G. A J.

In: Microelectronic Engineering, Vol. 67-68, 06.2003, p. 789-796.

Research output: Contribution to journalArticle

Teh, AS, Lee, SB, Teo, KBK, Chhowalla, M, Milne, WI, Hasko, DG, Ahmed, H & Amaratunga, GAJ 2003, 'Lateral field emitters fabricated using carbon nanotubes', Microelectronic Engineering, vol. 67-68, pp. 789-796. https://doi.org/10.1016/S0167-9317(03)00140-0
Teh, A. S. ; Lee, S. B. ; Teo, K. B K ; Chhowalla, Manish ; Milne, W. I. ; Hasko, D. G. ; Ahmed, H. ; Amaratunga, G. A J. / Lateral field emitters fabricated using carbon nanotubes. In: Microelectronic Engineering. 2003 ; Vol. 67-68. pp. 789-796.
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