Abstract
We report on the fabrication of lateral emitters using carbon nanotubes (CNTs) grown via plasma enhanced chemical vapour deposition (PECVD). Carbon nanotubes are dispersed randomly onto a substrate, mapped, contacted with metal, and by etching the substrate, a suspended lateral emitter structure is formed. Field emission measurements from the lateral emitters show a turn-on voltage as low as 12 V. The emission characteristics showed good fits to the Fowler-Nordheim (FN) theory indicating that conventional field emission was indeed observed from these devices.
| Original language | English |
|---|---|
| Pages (from-to) | 789-796 |
| Number of pages | 8 |
| Journal | Microelectronic Engineering |
| Volume | 67-68 |
| DOIs | |
| Publication status | Published - Jun 1 2003 |
| Event | Proceedings of the 28th International Conference on MNE - Lugano, Switzerland Duration: Sep 16 2002 → Sep 19 2002 |
Keywords
- Carbon nanotube
- Field emission
- Lateral
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
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Cite this
Teh, A. S., Lee, S. B., Teo, K. B. K., Chhowalla, M., Milne, W. I., Hasko, D. G., Ahmed, H., & Amaratunga, G. A. J. (2003). Lateral field emitters fabricated using carbon nanotubes. Microelectronic Engineering, 67-68, 789-796. https://doi.org/10.1016/S0167-9317(03)00140-0