Abstract
We report on the fabrication of lateral emitters using carbon nanotubes (CNTs) grown via plasma enhanced chemical vapour deposition (PECVD). Carbon nanotubes are dispersed randomly onto a substrate, mapped, contacted with metal, and by etching the substrate, a suspended lateral emitter structure is formed. Field emission measurements from the lateral emitters show a turn-on voltage as low as 12 V. The emission characteristics showed good fits to the Fowler-Nordheim (FN) theory indicating that conventional field emission was indeed observed from these devices.
| Original language | English |
|---|---|
| Pages (from-to) | 789-796 |
| Number of pages | 8 |
| Journal | Microelectronic Engineering |
| Volume | 67-68 |
| DOIs | |
| Publication status | Published - Jun 2003 |
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Keywords
- Carbon nanotube
- Field emission
- Lateral
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Atomic and Molecular Physics, and Optics
Cite this
Lateral field emitters fabricated using carbon nanotubes. / Teh, A. S.; Lee, S. B.; Teo, K. B K; Chhowalla, Manish; Milne, W. I.; Hasko, D. G.; Ahmed, H.; Amaratunga, G. A J.
In: Microelectronic Engineering, Vol. 67-68, 06.2003, p. 789-796.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Lateral field emitters fabricated using carbon nanotubes
AU - Teh, A. S.
AU - Lee, S. B.
AU - Teo, K. B K
AU - Chhowalla, Manish
AU - Milne, W. I.
AU - Hasko, D. G.
AU - Ahmed, H.
AU - Amaratunga, G. A J
PY - 2003/6
Y1 - 2003/6
N2 - We report on the fabrication of lateral emitters using carbon nanotubes (CNTs) grown via plasma enhanced chemical vapour deposition (PECVD). Carbon nanotubes are dispersed randomly onto a substrate, mapped, contacted with metal, and by etching the substrate, a suspended lateral emitter structure is formed. Field emission measurements from the lateral emitters show a turn-on voltage as low as 12 V. The emission characteristics showed good fits to the Fowler-Nordheim (FN) theory indicating that conventional field emission was indeed observed from these devices.
AB - We report on the fabrication of lateral emitters using carbon nanotubes (CNTs) grown via plasma enhanced chemical vapour deposition (PECVD). Carbon nanotubes are dispersed randomly onto a substrate, mapped, contacted with metal, and by etching the substrate, a suspended lateral emitter structure is formed. Field emission measurements from the lateral emitters show a turn-on voltage as low as 12 V. The emission characteristics showed good fits to the Fowler-Nordheim (FN) theory indicating that conventional field emission was indeed observed from these devices.
KW - Carbon nanotube
KW - Field emission
KW - Lateral
UR - http://www.scopus.com/inward/record.url?scp=0038358266&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0038358266&partnerID=8YFLogxK
U2 - 10.1016/S0167-9317(03)00140-0
DO - 10.1016/S0167-9317(03)00140-0
M3 - Article
AN - SCOPUS:0038358266
VL - 67-68
SP - 789
EP - 796
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
ER -