Liquid-Phase Beam Pen Lithography

Shu He, Zhuang Xie, Daniel J. Park, Xing Liao, Keith A. Brown, Peng Cheng Chen, Yu Zhou, George C Schatz, Chad A. Mirkin

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.

Original languageEnglish
Pages (from-to)988-993
Number of pages6
JournalSmall
Volume12
Issue number8
DOIs
Publication statusPublished - Feb 24 2016

Fingerprint

Light pens
Lithography
Nucleotides
Liquids
Photochemical reactions
Substrates
Experiments

Keywords

  • beam pen lithography
  • lithography
  • nucleotide nanoarrays
  • photochemistry
  • photolithography
  • scanning probe lithography

ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology

Cite this

He, S., Xie, Z., Park, D. J., Liao, X., Brown, K. A., Chen, P. C., ... Mirkin, C. A. (2016). Liquid-Phase Beam Pen Lithography. Small, 12(8), 988-993. https://doi.org/10.1002/smll.201502666

Liquid-Phase Beam Pen Lithography. / He, Shu; Xie, Zhuang; Park, Daniel J.; Liao, Xing; Brown, Keith A.; Chen, Peng Cheng; Zhou, Yu; Schatz, George C; Mirkin, Chad A.

In: Small, Vol. 12, No. 8, 24.02.2016, p. 988-993.

Research output: Contribution to journalArticle

He, S, Xie, Z, Park, DJ, Liao, X, Brown, KA, Chen, PC, Zhou, Y, Schatz, GC & Mirkin, CA 2016, 'Liquid-Phase Beam Pen Lithography', Small, vol. 12, no. 8, pp. 988-993. https://doi.org/10.1002/smll.201502666
He S, Xie Z, Park DJ, Liao X, Brown KA, Chen PC et al. Liquid-Phase Beam Pen Lithography. Small. 2016 Feb 24;12(8):988-993. https://doi.org/10.1002/smll.201502666
He, Shu ; Xie, Zhuang ; Park, Daniel J. ; Liao, Xing ; Brown, Keith A. ; Chen, Peng Cheng ; Zhou, Yu ; Schatz, George C ; Mirkin, Chad A. / Liquid-Phase Beam Pen Lithography. In: Small. 2016 ; Vol. 12, No. 8. pp. 988-993.
@article{bd962044c65442be99f955b574d3832a,
title = "Liquid-Phase Beam Pen Lithography",
abstract = "Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.",
keywords = "beam pen lithography, lithography, nucleotide nanoarrays, photochemistry, photolithography, scanning probe lithography",
author = "Shu He and Zhuang Xie and Park, {Daniel J.} and Xing Liao and Brown, {Keith A.} and Chen, {Peng Cheng} and Yu Zhou and Schatz, {George C} and Mirkin, {Chad A.}",
year = "2016",
month = "2",
day = "24",
doi = "10.1002/smll.201502666",
language = "English",
volume = "12",
pages = "988--993",
journal = "Small",
issn = "1613-6810",
publisher = "Wiley-VCH Verlag",
number = "8",

}

TY - JOUR

T1 - Liquid-Phase Beam Pen Lithography

AU - He, Shu

AU - Xie, Zhuang

AU - Park, Daniel J.

AU - Liao, Xing

AU - Brown, Keith A.

AU - Chen, Peng Cheng

AU - Zhou, Yu

AU - Schatz, George C

AU - Mirkin, Chad A.

PY - 2016/2/24

Y1 - 2016/2/24

N2 - Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.

AB - Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.

KW - beam pen lithography

KW - lithography

KW - nucleotide nanoarrays

KW - photochemistry

KW - photolithography

KW - scanning probe lithography

UR - http://www.scopus.com/inward/record.url?scp=84958772787&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84958772787&partnerID=8YFLogxK

U2 - 10.1002/smll.201502666

DO - 10.1002/smll.201502666

M3 - Article

VL - 12

SP - 988

EP - 993

JO - Small

JF - Small

SN - 1613-6810

IS - 8

ER -