Liquid-Phase Beam Pen Lithography

Shu He, Zhuang Xie, Daniel J. Park, Xing Liao, Keith A. Brown, Peng Cheng Chen, Yu Zhou, George C Schatz, Chad A. Mirkin

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Beam pen lithography (BPL) in the liquid phase is evaluated. The effect of tip-substrate gap and aperture size on patterning performance is systematically investigated. As a proof-of-concept experiment, nanoarrays of nucleotides are synthesized using BPL in an organic medium, pointing toward the potential of using liquid phase BPL to perform localized photochemical reactions that require a liquid medium.

Original languageEnglish
Pages (from-to)988-993
Number of pages6
JournalSmall
Volume12
Issue number8
DOIs
Publication statusPublished - Feb 24 2016

Keywords

  • beam pen lithography
  • lithography
  • nucleotide nanoarrays
  • photochemistry
  • photolithography
  • scanning probe lithography

ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology

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  • Cite this

    He, S., Xie, Z., Park, D. J., Liao, X., Brown, K. A., Chen, P. C., Zhou, Y., Schatz, G. C., & Mirkin, C. A. (2016). Liquid-Phase Beam Pen Lithography. Small, 12(8), 988-993. https://doi.org/10.1002/smll.201502666