Liquid source MOCVD of high quality YBa2Cu3O7-x films on polycrystalline and amorphous substrates

D. B. Studebaker, G. Doubinina, J. Zhang, Y. Y. Wang, V. P. Dravid, Tobin J Marks

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)


High temperature superconducting YBa2Cu3O7-x films were grown by liquid delivery metal-organic chemical vapor deposition (LDMOCVD) on silver-coated stainless steel substrates. The films are c-axis oriented, and exhibit a very low surface resistance of 110 μΩ at 77 K and 3 GHz. A two-step LDMOCVD method for growth of oriented (200) CeO2 films on amorphous substrates was also developed. Films of CeO2 for YBCO buffer layers were grown on fused silica (SiO2), polycrystalline alumina (Al2O3), and sapphire (Al2O3). A highly c-axis oriented film of YBCO was grown on a fused silica substrate with a CeO2 buffer layer.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Number of pages6
Publication statusPublished - 1996
EventProceedings of the 1995 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 27 1995Dec 2 1995


OtherProceedings of the 1995 MRS Fall Meeting
CityBoston, MA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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