Localized surface plasmon resonance nanosensor

A high-resolution distance-dependence study using atomic layer deposition

Alyson V. Whitney, Jeffrey W. Elam, Shengli Zou, Alex V. Zinovev, Peter C Stair, George C Schatz, Richard P. Van Duyne

Research output: Contribution to journalArticle

261 Citations (Scopus)

Abstract

Atomic layer deposition (ALD) is used to deposit 1-600 monolayers of Al 2O 3 on Ag nanotriangles fabricated by nanosphere lithography (NSL). Each monolayer of Al 2O 3 has a thickness of 1.1 Å. It is demonstrated that the localized surface plasmon resonance (LSPR) nanosensor can detect Al 2O 3 film growth with atomic spatial resolution normal to the nanoparticle surface. This is approximately 10 times greater spatial resolution than that in our previous long-range distance-dependence study using multilayer self-assembled monolayer shells. The use of ALD enables the study of both the long- and short-range distance dependence of the LSPR nanosensor in a single unified experiment. Ag nanoparticles with fixed in-plane widths and decreasing heights yield larger sensing distances. X-ray photoelectron spectroscopy, variable angle spectroscopic ellipsometry, and quartz crystal microbalance measurements are used to study the growth mechanism. It is proposed that the growth of Al 2O 3 is initiated by the decomposition of trimethylaluminum on Ag. Semiquantitative theoretical calculations were compared with the experimental results and yield excellent agreement.

Original languageEnglish
Pages (from-to)20522-20528
Number of pages7
JournalJournal of Physical Chemistry B
Volume109
Issue number43
DOIs
Publication statusPublished - Nov 3 2005

Fingerprint

Nanosensors
Atomic layer deposition
Surface plasmon resonance
atomic layer epitaxy
surface plasmon resonance
Monolayers
Nanoparticles
Spectroscopic ellipsometry
Nanospheres
Quartz crystal microbalances
high resolution
Self assembled monolayers
Film growth
spatial resolution
Lithography
nanoparticles
Multilayers
Deposits
X ray photoelectron spectroscopy
quartz crystals

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry

Cite this

Localized surface plasmon resonance nanosensor : A high-resolution distance-dependence study using atomic layer deposition. / Whitney, Alyson V.; Elam, Jeffrey W.; Zou, Shengli; Zinovev, Alex V.; Stair, Peter C; Schatz, George C; Van Duyne, Richard P.

In: Journal of Physical Chemistry B, Vol. 109, No. 43, 03.11.2005, p. 20522-20528.

Research output: Contribution to journalArticle

Whitney, Alyson V. ; Elam, Jeffrey W. ; Zou, Shengli ; Zinovev, Alex V. ; Stair, Peter C ; Schatz, George C ; Van Duyne, Richard P. / Localized surface plasmon resonance nanosensor : A high-resolution distance-dependence study using atomic layer deposition. In: Journal of Physical Chemistry B. 2005 ; Vol. 109, No. 43. pp. 20522-20528.
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