Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films

Boya Cui, D. Bruce Buchholz, Li Zeng, Michael Bedzyk, Robert P. H. Chang, Matthew Grayson

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.

Original languageEnglish
Pages (from-to)1631-1636
Number of pages6
JournalMRS Advances
Volume1
Issue number22
DOIs
Publication statusPublished - Jan 1 2016

Fingerprint

Thermal conductivity
thermal conductivity
Thin films
room temperature
thin films
Temperature
Crystalline materials
Structural relaxation
Pulsed laser deposition
Vacancies
pulsed laser deposition
crystallinity
Grain boundaries
grain boundaries
Oxygen
X ray diffraction
Crystals
evaluation
oxygen
diffraction

Keywords

  • thermal conductivity
  • thin film
  • transparent conductor

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films. / Cui, Boya; Bruce Buchholz, D.; Zeng, Li; Bedzyk, Michael; Chang, Robert P. H.; Grayson, Matthew.

In: MRS Advances, Vol. 1, No. 22, 01.01.2016, p. 1631-1636.

Research output: Contribution to journalArticle

Cui, B, Bruce Buchholz, D, Zeng, L, Bedzyk, M, Chang, RPH & Grayson, M 2016, 'Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films', MRS Advances, vol. 1, no. 22, pp. 1631-1636. https://doi.org/10.1557/adv.2016.142
Cui, Boya ; Bruce Buchholz, D. ; Zeng, Li ; Bedzyk, Michael ; Chang, Robert P. H. ; Grayson, Matthew. / Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films. In: MRS Advances. 2016 ; Vol. 1, No. 22. pp. 1631-1636.
@article{de9210b437f64d88b9b2224944f42b52,
title = "Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films",
abstract = "The cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.",
keywords = "thermal conductivity, thin film, transparent conductor",
author = "Boya Cui and {Bruce Buchholz}, D. and Li Zeng and Michael Bedzyk and Chang, {Robert P. H.} and Matthew Grayson",
year = "2016",
month = "1",
day = "1",
doi = "10.1557/adv.2016.142",
language = "English",
volume = "1",
pages = "1631--1636",
journal = "MRS Advances",
issn = "2059-8521",
number = "22",

}

TY - JOUR

T1 - Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films

AU - Cui, Boya

AU - Bruce Buchholz, D.

AU - Zeng, Li

AU - Bedzyk, Michael

AU - Chang, Robert P. H.

AU - Grayson, Matthew

PY - 2016/1/1

Y1 - 2016/1/1

N2 - The cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.

AB - The cross-plane thermal conductivities of InGaZnO (IGZO) thin films in different morphologies were measured on three occasions within 19 months, using the 3ω method at room temperature 300 K. Amorphous (a-), semi-crystalline (semi-c-) and crystalline (c-) IGZO films were grown by pulsed laser deposition (PLD), followed by X-ray diffraction (XRD) for evaluation of film quality and crystallinity. Semi-c-IGZO shows the highest thermal conductivity, even higher than the most ordered crystal-like phase. After being stored in dry low-oxygen environment for months, a drastic decrease of semi-c-IGZO thermal conductivity was observed, while the thermal conductivity slightly reduced in c-IGZO and remained unchanged in a-IGZO. This change in thermal conductivity with storage time can be attributed to film structural relaxation and vacancy diffusion to grain boundaries.

KW - thermal conductivity

KW - thin film

KW - transparent conductor

UR - http://www.scopus.com/inward/record.url?scp=85006709740&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85006709740&partnerID=8YFLogxK

U2 - 10.1557/adv.2016.142

DO - 10.1557/adv.2016.142

M3 - Article

AN - SCOPUS:85006709740

VL - 1

SP - 1631

EP - 1636

JO - MRS Advances

JF - MRS Advances

SN - 2059-8521

IS - 22

ER -