Low pressure organometallic chemical vapor deposition of high-Tc superconducting YBa2Cu3O7-δ films

Jing Zhao, Klaus Hermann Dahmen, Henry O. Marcy, Lauren M. Tonge, Bruce W. Wessels, Tobin J Marks, Carl R. Kannewurf

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

High-Tc superconducting YBa2Cu3O7-δ films have been prepared by low-pressure organometallic chemical vapor deposition using Cu(acetylacetonate)2, Y(dipivaloylmethanate)3, and Ba(dipivaloylmethanate)2 as volatile metal-organic precursors. An argon carrier gas is employed and water vapor serves as the reactant. Film growth rates of 10-30 nm min-1 are achieved at a system pressure of 5 torr. After annealing under oxygen, the YBa2Cu3O7-δ films deposited on SrTiO3 exhibit excellent compositional and structural uniformity in addition to preferential orientation of crystalline c axes perpendicular to the SrTiO3 surface. The onset of superconductivity is at ca. 90 K and zero resistance is achieved by 47 K.

Original languageEnglish
Pages (from-to)187-189
Number of pages3
JournalSolid State Communications
Volume69
Issue number2
DOIs
Publication statusPublished - 1989

Fingerprint

Superconducting films
superconducting films
Organometallics
Chemical vapor deposition
low pressure
vapor deposition
Argon
Steam
Film growth
Superconductivity
Crystal orientation
Water vapor
water vapor
superconductivity
Gases
Metals
argon
Annealing
vapors
Oxygen

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Low pressure organometallic chemical vapor deposition of high-Tc superconducting YBa2Cu3O7-δ films. / Zhao, Jing; Dahmen, Klaus Hermann; Marcy, Henry O.; Tonge, Lauren M.; Wessels, Bruce W.; Marks, Tobin J; Kannewurf, Carl R.

In: Solid State Communications, Vol. 69, No. 2, 1989, p. 187-189.

Research output: Contribution to journalArticle

Zhao, Jing ; Dahmen, Klaus Hermann ; Marcy, Henry O. ; Tonge, Lauren M. ; Wessels, Bruce W. ; Marks, Tobin J ; Kannewurf, Carl R. / Low pressure organometallic chemical vapor deposition of high-Tc superconducting YBa2Cu3O7-δ films. In: Solid State Communications. 1989 ; Vol. 69, No. 2. pp. 187-189.
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AU - Wessels, Bruce W.

AU - Marks, Tobin J

AU - Kannewurf, Carl R.

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