Abstract
A low-temperature (≊400°C) plasma-enhanced chemical vapor deposition process has been developed to grow diamond films for optical coatings application. Films with fine grains (≤3000 Å) have been obtained by controlling diamond nucleation. The surface roughness of the films is on the order of 50-200 Å. The optical transparency of the films is over 60% in the range 0.6-2 μm wavelength, which is comparable to that of Type IIa natural diamond. Using a block-on ring tribotester, it is found that the diamond films adhere well to quartz substrates.
| Original language | English |
|---|---|
| Pages (from-to) | 2063-2065 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 55 |
| Issue number | 20 |
| DOIs | |
| Publication status | Published - 1989 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Low-temperature deposition of diamond films for optical coatings. / Ong, T. P.; Chang, Robert P. H.
In: Applied Physics Letters, Vol. 55, No. 20, 1989, p. 2063-2065.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Low-temperature deposition of diamond films for optical coatings
AU - Ong, T. P.
AU - Chang, Robert P. H.
PY - 1989
Y1 - 1989
N2 - A low-temperature (≊400°C) plasma-enhanced chemical vapor deposition process has been developed to grow diamond films for optical coatings application. Films with fine grains (≤3000 Å) have been obtained by controlling diamond nucleation. The surface roughness of the films is on the order of 50-200 Å. The optical transparency of the films is over 60% in the range 0.6-2 μm wavelength, which is comparable to that of Type IIa natural diamond. Using a block-on ring tribotester, it is found that the diamond films adhere well to quartz substrates.
AB - A low-temperature (≊400°C) plasma-enhanced chemical vapor deposition process has been developed to grow diamond films for optical coatings application. Films with fine grains (≤3000 Å) have been obtained by controlling diamond nucleation. The surface roughness of the films is on the order of 50-200 Å. The optical transparency of the films is over 60% in the range 0.6-2 μm wavelength, which is comparable to that of Type IIa natural diamond. Using a block-on ring tribotester, it is found that the diamond films adhere well to quartz substrates.
UR - http://www.scopus.com/inward/record.url?scp=0001086393&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0001086393&partnerID=8YFLogxK
U2 - 10.1063/1.102106
DO - 10.1063/1.102106
M3 - Article
AN - SCOPUS:0001086393
VL - 55
SP - 2063
EP - 2065
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 20
ER -