Low-temperature deposition of diamond films for optical coatings

T. P. Ong; R. P.H. Chang

doi:10.1063/1.102106

Low-temperature deposition of diamond films for optical coatings

T. P. Ong, R. P.H. Chang

Northwestern University

Research output: Contribution to journal › Article › peer-review

78 Citations (Scopus)

Abstract

A low-temperature (≊400°C) plasma-enhanced chemical vapor deposition process has been developed to grow diamond films for optical coatings application. Films with fine grains (≤3000 Å) have been obtained by controlling diamond nucleation. The surface roughness of the films is on the order of 50-200 Å. The optical transparency of the films is over 60% in the range 0.6-2 μm wavelength, which is comparable to that of Type IIa natural diamond. Using a block-on ring tribotester, it is found that the diamond films adhere well to quartz substrates.

Original language	English
Pages (from-to)	2063-2065
Number of pages	3
Journal	Applied Physics Letters
Volume	55
Issue number	20
DOIs	https://doi.org/10.1063/1.102106
Publication status	Published - 1989

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Low-temperature deposition of diamond films for optical coatings",

abstract = "A low-temperature (≊400°C) plasma-enhanced chemical vapor deposition process has been developed to grow diamond films for optical coatings application. Films with fine grains (≤3000 {\AA}) have been obtained by controlling diamond nucleation. The surface roughness of the films is on the order of 50-200 {\AA}. The optical transparency of the films is over 60% in the range 0.6-2 μm wavelength, which is comparable to that of Type IIa natural diamond. Using a block-on ring tribotester, it is found that the diamond films adhere well to quartz substrates.",

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AB - A low-temperature (≊400°C) plasma-enhanced chemical vapor deposition process has been developed to grow diamond films for optical coatings application. Films with fine grains (≤3000 Å) have been obtained by controlling diamond nucleation. The surface roughness of the films is on the order of 50-200 Å. The optical transparency of the films is over 60% in the range 0.6-2 μm wavelength, which is comparable to that of Type IIa natural diamond. Using a block-on ring tribotester, it is found that the diamond films adhere well to quartz substrates.

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