Magnetic anisotropy in dc diode getter sputtered GdCo films - how important is the argon content in the films

D. D. Bacon, M. Hong, E. M. Gyorgy, P. K. Gallagher, S. Nakahara, Leonard C Feldman

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Amorphous magnetic GdCo films were prepared by a dc diode getter sputtering technique with no bias field applied to the substrate during the film growth. Films (type I) obtained using 1.0 kV and 60 mTorr Ar during the sputtering show perpendicular anisotropy with Keff u =1.5×10 5 erg/cm3. Films (type II) deposited at 2.0 kV and 28 mTorr Ar exhibit magnetic isotropy with Kin u≊0. However, the actual argon content in the type II films is three times of that in the type I films. Nevertheless, the argon impurity in both the type I and type II films is ≤1.0 at. %, which is far less than those obtained in the biased rf diode sputtered GdCo films. Also, the distribution of argon is uniform in the film as observed from the Rutherford backscattering spectrometry.

Original languageEnglish
Pages (from-to)730-732
Number of pages3
JournalApplied Physics Letters
Volume48
Issue number11
DOIs
Publication statusPublished - 1986

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diodes
argon
anisotropy
sputtering
magnetic films
isotropy
backscattering
impurities
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Magnetic anisotropy in dc diode getter sputtered GdCo films - how important is the argon content in the films. / Bacon, D. D.; Hong, M.; Gyorgy, E. M.; Gallagher, P. K.; Nakahara, S.; Feldman, Leonard C.

In: Applied Physics Letters, Vol. 48, No. 11, 1986, p. 730-732.

Research output: Contribution to journalArticle

Bacon, D. D. ; Hong, M. ; Gyorgy, E. M. ; Gallagher, P. K. ; Nakahara, S. ; Feldman, Leonard C. / Magnetic anisotropy in dc diode getter sputtered GdCo films - how important is the argon content in the films. In: Applied Physics Letters. 1986 ; Vol. 48, No. 11. pp. 730-732.
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